Attachment 1 SOW.pdf

NIST Requirements Document 5-Axis Nanomotion Stages

I. Background/Purpose:

The Microsystems and Nanotechnology Division in the National Institute of Standards and Technology (NIST) requires two (2) 5-axis nanomotion stages for the development of a nanophotonic probe station, which will be used to couple light into and out of photonic integrated circuits in vacuum for device characterization and performance testing.

II. Minimum Requirements

Contract Line Item 0001:

The Contractor shall provide a Firm Fixed Price quotation for the following:

5-axis motion stages, Quantity 2

The 5-axis nanomotion stages shall meet or exceed the technical specifications listed below.

All items must be new. Used or remanufactured equipment will not be considered for award. Experimental, prototype, or custom items will not be considered. The use of “gray market” components not authorized for sale in the U.S. by the proposer is not acceptable. All line items shall be shipped in the original manufacturer’s packaging and include all original documentation and software, when applicable.

Technical Specifications:

The nanomotion stages must have the following functionalities:

1. Each nanomotion stage (Quantity 2 needed) must have 5 motion degrees of freedom, defined as X, Y, Z, roll, and yaw. Pitch motion is not needed.

2. It is expected that multiple single axis motion stages will be stacked up to achieve the 5 motion degrees of freedom. The stacking order, starting at the bottom, should be interchangeable between a) X, Y, Z, yaw, roll, and b) X, Y, Z, roll, yaw.

3. All components needed to assemble the 5 axis nanomotion stages must be included.

4. Each motion axis must be driven with piezoelectric actuators.

5. Each motion axis must have an integrated sensor for measuring motion.

6. A digital motion controller must be included.

7. Software for commanding motions in the stages must be included and must operate in

LabView, Matlab, or with Python.

8. The nanomotion stages must be capable of operating in high vacuum.

9. A vacuum feedthrough for all input and output electrical signals in the nanomotion station must be included.

The rate table must meet the following Minimum Specifications.

Minimum Specifications

Specifications for the X, Y, and Z axes

10. Coarse motion travel range: 30 mm or larger

11. Coarse motion minimum step size: 250 nm or smaller

12. Fine motion travel range: 1.6 micrometers or greater

13. Fine motion resolution: 5 nm or better

14. Sensor resolution: 5 nm or better

15. Maximum payload: 2 kg or greater

Specifications for the yaw axis

16. Coarse motion rotation range: 360 degrees

17. Fine motion rotation range: 0.02 degrees or greater

18. Fine motion rotation resolution: 10 microdegrees or smaller

19. Sensor resolution: 0.1 millidegrees or smaller

20. Maximum payload: 2 kg or greater

Specifications for the roll axis

21. Coarse motion rotation range: 10 degrees or greater

22. Fine motion rotation range: 0.001 degrees or greater

23. Fine motion rotation resolution: 0.1 millidegrees or smaller

24. Sensor resolution: 0.1 millidegrees or smaller

25. Maximum payload: 1 kg or greater

Other specifications

26. Vacuum compatibility base pressure: 10-7 torr

27. Vacuum feedthrough flange: Standard conflate flange, e.g., CF 63, CF100

III. Deliverables:

Delivery shall be FOB destination and shall occur within 16 weeks. FOB Destination means:

The contractor shall pack and mark the shipment in conformance with carrier requirements, deliver the shipment in good order and condition to the point of delivery specified in the purchase order, be responsible for any loss of and/or damage to the goods occurring before receipt and acceptance of the shipment by the consignee at the delivery point specified in the purchase order; and pay all charges to the specified point of delivery. The contractor shall deliver all Line Items to:

National Institute of Standards and Technology 100 Bureau Drive Gaithersburg, MD 20899-1640

IV. Inspection and Acceptance

In addition to the inspection and acceptance terms articulated in 52.212-4, the Government reserves the right to assemble the motion stages and verify that they move over the specified range. Such tests and evaluations, if performed, shall be conducted within the environment that the system is to be operated. The Contractor has the right to be present during the tests and evaluations, if performed, at the Contractor’s expense.

The place of acceptance shall be:

100 Bureau Drive Building 220 Gaithersburg, MD 20899

V. Installation

Installation will be completed by NIST.

VI. Warranty

The contractor shall warrant the products and provide support for a minimum of one year after acceptance and shall be in accordance with terms in FAR 52.212-4

VII. Payment Schedule

The Contractor shall be paid, in accordance with Net 30-day payment terms, upon receipt and acceptance of a proper invoice, in accordance with the following schedule:

1. 100% after receipt and acceptance by the Subject Matter Expert (SME) in coordination with the Contracting Officer (CO) of the fully delivered products.

NOTE: Partial shipments and partial invoices will not be accepted, unless other-wise requested and accepted by the Contracting Officer prior to award offer. Proposed payment schedules shall be submitted with vendor’s response to the RFQ for consideration.