Attachment 1 23-00599 SOW 10-11-2023.pdf

STATEMENT OF WORK/REQUIREMENTS DOCUMENT

Title: Procurement of Analytical Detectors for Focused Ion Beam and Scanning Electron

Microscope Systems October 11, 2023

*Paragraphs in red font with brackets are for response clarification and will be removed in the final award.

I. BACKGROUND INFORMATION

The Precision Imaging Facility at the National Institute of Standards and Technology (NIST) is involved in the characterization of metals, semiconductors, and insulators in support of multiple projects.

Materials characterization allows NIST scientists to make direct correlations between material processing, (nano)structure, and resulting properties. This work involves the analysis of material structure chemistry using scanning electron microscope (SEM) instruments as well as dual beam focused ion beam/scanning electron microscope (FIB/SEM) systems. To take the most advantage of the SEM and FIB/SEM instruments, the systems will be outfitted with analytical detectors.

The two types of analytical detectors of interest in this work are energy dispersive x-ray spectroscopy (EDS) detectors and electron backscatter diffraction (EBSD) detectors. The EDS type detector collects characteristic x-rays generated from the sample to allow for quantitative chemical characterization. The EBSD type detector collects diffraction patterns generated from the sample to enable quantitative and localized characterization of the crystalline structure of the materials.

This list of functions is not exhaustive and contract proposers should carefully review the “Minimum Requirements” section in this document. In this work, NIST is seeking up to four sets of EDS and EBSD detectors:

A. A large detector area energy dispersive x-ray detector to be paired with a high-speed electron backscatter diffraction detector. These two detectors will be installed on a Thermo Fisher Scios 2 dual beam FIB/SEM system. The Scios 2 will be outfitted with a secondary ion mass spectrometry system, which requires that the EDS detector be installed on “Port G2” of the Scios 2 FIB/SEM. [All proposals shall include any flanges, cables, hardware, or software required to install the EDS detector on “Port G2.”]

B. A large detector area energy dispersive x-ray detector to be paired with a high-speed electron backscatter diffraction detector. These two detectors will be installed on a Thermo Fisher Apreo 2S scanning electron microscope.

C. OPTION: A large detector area energy dispersive x-ray detector to be paired with a high-speed electron backscatter diffraction detector. These two detectors will be installed on Thermo Fisher Helios 5 UX FIB/SEM system.

D. OPTION: A large detector area energy dispersive x-ray detector to be paired with a high-speed electron backscatter diffraction detector. These two detectors will be installed on a Thermo Fisher Scios 2 dual beam FIB/SEM system. This system shall have the EDS detector configured for the standard port on the Scios 2 FIB/SEM.

Consistent with NIST’s mission to develop measurement science, a particular research focus of these detectors will be to evaluate the sources of systematic and statistical error that limit the efficacy of EDS and EBSD techniques, to devise strategies to mitigate these uncertainties, and to develop metrics that quantify the results.

II. SCOPE

The Contractor shall deliver and install up to four sets of detectors with features as defined in the “Minimum Requirements” section inclusive of FOB Destination. Control and support computers (as necessary) shall also be included, as well as all software as defined in the “Minimum Requirements” section. In-person training shall be provided for two (2) days for each set of detectors and the systems shall be covered under warranty for at least one (1) year to include all parts, software, labor, and travel, as defined in the “Minimum Requirements” section.

III. MINIMUM REQUIREMENTS

General Requirements for all CLINS:

A. All CLINS shall consist of all new, commercially available items. Prototypes, first-article systems, demonstration models, used or refurbished instruments will not be considered for award.

Compatibility Between Systems in CLIN 0001, 0002, 0003, and 0004:

A. Compatible software, user interface and data types:

a. The four systems provided by the Contractor shall operate with identical software with an identical user interface.

b. The four systems provided by the Contractor shall output identical data file types.

System 1: Energy Dispersive X-ray Detector and Electron Backscatter Detector to be Installed on Thermo Fisher Scios 2 FIB/SEM System

CLIN 0001: Energy dispersive x-ray detector and electron backscatter detector to be installed on a Thermo Fisher Scios 2 FIB/SEM system Description: A suite of two detectors (one EDS and one EBSD) to be installed on a Thermo Fisher Scios 2 dual beam focused ion beam/scanning electron microscope Quantity: one (1)

Technical Specifications:

A. Microscope Interface

a. All systems defined below shall be configured to interface with a Thermo Fisher Scios 2 focused ion beam scanning electron microscope (FIB/SEM) system.

b. The detector system(s) defined below shall include all software to integrate with the instrument system including, but not limited to:

1. Controlling the electron beam and ion beam (if required/appropriate)

2. Reading detector signals from the instrument

3. Controlling the instrument stage

4. Reading imaging metadata from the instrument

c. The EDS/EBSD system shall include all cables, vacuum flanges, and other hardware to interface with the microscope system

i. Due to the configuration of the Thermo Fisher Scios 2 FIB/SEM system, the

EDS detector shall be installed on “Port G2” of the Thermo Fisher Scios 2 FIB/SEM system. All cables, vacuum flanges, and other hardware for this non-standard installation shall be included.

ii. Offerors are encouraged to contact Thermo Fisher Scientific for any required clarifications on using “Port G2.”

B. Data collection and analysis computer

a. The computer included with the detector system defined below shall run the Windows 10 operating system (or newer)

b. The computer included with the detector system defined below shall have sufficient computing power to perform all software functions defined below in a reasonable amount of time

C. Energy Dispersive X-ray (EDS) Detector:

a. Detector cooling

i. The detector system shall not require liquid nitrogen or any external cooling water.

b. Detector stage

i. The energy dispersive x-ray (EDS) detector shall be fully retractable such that the detector does not interfere with normal microscope operations when retracted.

ii. The EDS detector shall be inserted into and retracted out of the instrument on a motorized linear stage.

iii. The insertion and retraction of the detector shall be controlled via the detector control software.

c. X-ray detector characteristics

i. The EDS detector shall be of the silicon drift detector (SDD) type.

ii. The size of the SDD shall be 65 mm2 or greater.

1. Preference will be given to larger area detectors.

iii. The SDD may be protected by either a ceramic or polymer window. Windowless detectors are also acceptable.

iv. The SDD shall have an energy resolution of 127 eV or better.

d. Signal processing characteristics

i. The detector and signal processing system shall be able to provide quantitative chemical information at count rates of 400,000 counts per second or higher.

e. EDS data collection and analysis software

i. The EDS detector system shall include all software to collect large-area EDS maps by tessellating and/or combining data from multiple stage locations.

ii. If outfitted on a FIB/SEM system, the EDS detector system shall include all software to collect three-dimensional EDS data based on serial sectioning using the focused ion beam.

iii. The collection and analysis software shall allow/enable the following features related to EDS data collection and analysis:

1. X-ray area mapping to produce a hyperspectral chemical map

2. X-ray line scan mapping to produce a hyperspectral chemical line scan

3. X-ray point scan to collect individual x-ray spectra

4. Allow standardless and standard-based quantification of EDS data, including quantitative point spectra, line scans, and area maps

5. Drift correction to account for stage drift during long data collection events

6. Automatically identify separate phases within the EDS map based on x-ray spectra

7. The ability to create a queue of multiple experiments to be performed in serial

8. The ability to collect and analyze data from a transmission electron microscope (TEM) sample in the FIB/SEM or SEM, commonly referred to as a “transmission SEM” geometry

D. Electron Backscatter Diffraction (EBSD) Detector

a. Detector cooling

i. The detector system shall not require liquid nitrogen or any external cooling water.

b. Detector stage

i. The electron backscatter diffraction (EBSD) detector shall be fully retractable such that the detector does not interfere with normal microscope operations when retracted.

ii. The EBSD detector shall be inserted into and retracted out of the instrument on a motorized stage.

iii. The insertion and retraction of the detector shall be controlled via the detector control software.

c. EBSD detector characteristics

i. The camera of the EBSD detector shall be of the CMOS type.

ii. The resolution of the EBSD detector camera shall be 640 x 480 pixels (or larger)

1. The camera resolution shall be able to be reduced (via binning) to increase the data collection speed.

2. Preference will be given to cameras with a higher maximum resolution.

iii. The maximum data collection speed of the EBSD detector shall be 5000 indexed points per second or faster.

iv. The EBSD detector shall include a forward scattered electron detector.

d. Signal processing characteristics

i. The detector, signal processing, and computer system shall allow the user to save all electron backscatter patterns collected during an experiment.

e. EBSD data collection and analysis software

i. The EBSD detector system shall include all software to collect large-area EBSD maps by tessellating and/or combining data from multiple stage locations.

ii. If outfitted on a FIB/SEM system, the EDS detector system shall include all software to collect three-dimensional EDS data based on serial sectioning using the focused ion beam.

iii. The collection and analysis software shall allow/enable the following features related to EDS data collection and analysis:

1. EBSD area mapping to produce images of material crystal structure and associated crystallographic orientations

2. One or more methods to clean/process the collected data, including removing of isolated errors and symmetric errors, among other errors

3. The ability to create images based on the specimen orientation (inverse pole figure), phase identification, local strain analysis (including dislocation analysis), grain boundary calculation, and EBSD pattern quality, among others.

4. Automated calculation of crystallographic grain size and orientation

5. Collection of forward scattering images during the collection of EBSD data

6. Measure features in EBSD data and associated maps and images

7. The ability to collect and analyze EBSD data based on the transmission

EBSD or transmission Kikuchi diffraction geometry

8. The ability to analyze saved or live EBSD patterns using dictionary indexing or pattern matching methods. These indexing/pattern matching methods may be used to index EBSD patterns or refine a pre-indexed dataset

E. Offline software licenses

a. The contractor shall provide one (1) software license to be used on computers other than the EDS/EBSD data collection/analysis computer. The primary function of this license is to allow for users to analyze data on computers other than the data collection/analysis computer.

F. Training

a. The Contractor shall provide at least two (2) days of training on the EDS/EBSD system that covers detector/software operation and basic maintenance.

b. The Contractor shall offer at least two (2) days of remote applications support on the

EDS/EBSD system.

G. Electrical Power

a. The system and all of its components shall be able to be powered by either 120 V/60 Hz single phase power or 208 V/60 Hz single phase or three phase power. If the tool requires power other than those describe above, the contractor may provide a suitable transformer that can be powered using the above electrical specifications.

H. Inspection and Acceptance

a. After system installation, the contractor shall demonstrate the system performs according to the system specifications using a standard site acceptance test. The system must pass the standard site acceptance test before it will be accepted.

I. Delivery and Installation

a. The contractor shall be responsible for delivering the EDS/EBSD detector system to its final location in Building 81 on the NIST campus in Boulder, CO. This is to include all required rigging from the delivery truck to the final detector placement in the NIST building.

b. During transport to the final tool location, the system components shall be able to pass through a freight elevator with doors that are 7 feet 11 inches tall and eight feet wide. The elevator platform has an entrance door to back length of 9 feet and a width of 13 feet, a cab height of 7 feet 11 inches, and has a weight limit of 10,000 pounds.

c. The contractor shall provide personnel that pass required government background checks to be issues badges for work on site.

J. The contractor shall schedule all visits to NIST for US citizens or permanent residents with the COR at least 2 weeks before arriving at the site. The contractor shall schedule all visits to NIST for non-US citizens or non-permanent residents with the COR at least 6 weeks before arriving at the site.

K. Travel

a. The contractor shall be responsible for all travel expenses for the contractor’s personnel.

b. The Government shall be responsible for all travel expenses for the Government’s personnel.

L. Contractor Supplied Materials

a. The contractor shall supply all parts, hardware, equipment, tools, and labor required to install the instrument.

M. Warranty

a. A one (1) year warranty (to cover parts, labor, and travel) is to be included with the

EDS/EBSD detector system, CLIN 0001.

CLIN 000101: Software Package to Improve EBSD Indexing OPTION Description: Software package that averages neighboring EBSD patterns to improve pattern indexing

Quantity: one (1) Option Execution: Within 120 days after contract award

A. If not included in the base configuration, the Contractor shall provide a software package that improves EBSD pattern indexing by comparing and/or averaging neighboring EBSD patterns.

CLIN 000102: Software Package to Improve Production of Atom Probe Tomography Specimens

OPTION

Description: Software package to provide crystallographic information during the focused ion beam preparation of atom probe tomography specimens improves atom probe tomography specimen preparation in the focused ion beam by providing specimen orientation information.

CLIN 000103: Software Package to Analyze Dislocations OPTION Description: Software package to provide analysis of dislocations within crystalline materials allows for the analysis of dislocations and their associated Burgers vectors.

CLIN 000104: Software Package to Classify Microstructures OPTION Description: Software package to provide classification of microstructures enables the automatic classification of microstructures in datasets, e.g. identifying phases of steel.

CLIN 000105: Software Package to Classify and Reconstruct Parent Microstructures OPTION Description: Software package to provide analysis of parent microstructures in materials that have undergone a displacive phase transformation can classify and reconstruct the parent microstructure after a displacive phase transformation.

CLIN 000106: Software Package to Calculate Material Elastic Properties OPTION Description: Software package to calculate elastic properties of crystalline materials can calculate the elastic properties of materials based on the EBSD orientation map.

CLIN 1001: Extended Warranty and Service Contract OPTION Description: One (1) year of extended warranty and service for the EDS/EBSD detector system Quantity: one (1)

Technical Specifications:

A. Extended Warranty and Service Contract

a. Quantity one (1) Year – Extended Warranty and Service Contract (1st year after warranty included in base system CLIN 0001). This service associated with this contract shall meet or exceed the initial one (1) year warranty included with the base detector system.

To be clear, executing this option would result in NIST having a total of at least two (2) years of detector warranty and/or service.

CLIN 2001: Extended Warranty and Service Contract OPTION Description: One (1) year of extended warranty and/or service for the EDS/EBSD detector system Quantity: one (1)

Technical Specifications:

A. Extended Warranty and Service Contract

a. Quantity one (1) Year – Extended Warranty and Service Contract (2nd year after warranty included in base system CLIN 0001) to start after the warranty/contract in CLIN 1001.

This service associated with this contract shall meet or exceed the initial one (1) year warranty included with the base instrument. To be clear, executing this option would result in NIST having a total of at least three (3) years of detector warranty and/or service.

CLIN 3001: Extended Warranty and Service Contract OPTION

Quantity: one (1)

Technical Specifications:

A. Extended Warranty and Service Contract

a. Quantity one (1) Year – Extended Warranty and Service Contract (3rd year after warranty included in base system CLIN 0001) to start after the warranty/contract in CLIN 2001.

This service associated with this contract shall meet or exceed the initial one (1) year warranty included with the base instrument. To be clear, executing this option would result in NIST having a total of at least four (4) years of warranty and service.

CLIN 4001: Extended Warranty and Service Contract OPTION Description: One (1) year of extended warranty and service for the scanning transmission electron microscope instrument Quantity: one (1)

Technical Specifications:

A. Extended Warranty and Service Contract

a. Quantity one (1) Year – Extended Warranty and Service Contract (4th year after warranty included in base system CLIN 0001) to start after the warranty/contract in CLIN 3001.

This service associated with this contract shall meet or exceed the initial one (1) year result in NIST having a total of at least five (5) years of warranty and service.

System 2: Energy Dispersive X-ray Detector and Electron Backscatter Detector to be Installed on a Thermo Fisher Apreo 2S SEM System

CLIN 0002: Energy dispersive x-ray detector and electron backscatter detector to be installed on a Thermo Fisher Apreo 2S SEM system Description: A suite of two detectors (one EDS and one EBSD) to be installed on a Thermo Fisher Apreo 2S scanning electron microscope

A. Microscope Interface

a. All systems defined below shall be configured to interface with a Thermo Fisher Apreo

2S scanning electron microscope (SEM) system.

b. The detector system(s) defined below shall include all software to integrate with the instrument system including, but not limited to:

1. Controlling the electron beam and ion beam (if required/appropriate)

2. Reading detector signals from the instrument

3. Controlling the instrument stage

4. Reading imaging metadata from the instrument

c. The EDS/EBSD system shall include all cables, flanges, and other hardware to interface with the microscope system

i. The EDS and EBSD detectors will be installed on the standard ports.

B. Additional Technical Specifications

a. The additional technical specifications of CLIN 0002 are identical to CLIN 0001 sections B-L

CLIN 000201: Software Package to Improve EBSD Indexing OPTION

B. If not included in the base configuration, the Contractor shall provide a software package that

CLIN 000202: Software Package to Analyze Dislocations OPTION

CLIN 000203: Software Package to Classify Microstructures OPTION

CLIN 000204: Software Package to Classify and Reconstruct Parent Microstructures OPTION undergone a displacive phase transformation

CLIN 000205: Software Package to Calculate Material Elastic Properties OPTION

CLIN 1002: Extended Warranty and Service Contract OPTION

Quantity: one (1)

Technical Specifications:

B. Extended Warranty and Service Contract

a. Quantity one (1) Year – Extended Warranty and Service Contract (1st year after warranty included in base system CLIN 0002). This service associated with this contract shall meet or exceed the initial one (1) year warranty included with the base detector system.

CLIN 2002: Extended Warranty and Service Contract OPTION

Quantity: one (1)

B. Extended Warranty and Service Contract

a. Quantity one (1) Year – Extended Warranty and Service Contract (2nd year after warranty included in base system CLIN 0001) to start after the warranty/contract in CLIN 1002.

This service associated with this contract shall meet or exceed the initial one (1) year warranty included with the base instrument. To be clear, executing this option would

CLIN 3002: Extended Warranty and Service Contract OPTION

Quantity: one (1)

Technical Specifications:

B. Extended Warranty and Service Contract

a. Quantity one (1) Year – Extended Warranty and Service Contract (3rd year after warranty included in base system CLIN 0001) to start after the warranty/contract in CLIN 2002.

This service associated with this contract shall meet or exceed the initial one (1) year

CLIN 4002: Extended Warranty and Service Contract OPTION microscope instrument Quantity: one (1)

Technical Specifications:

B. Extended Warranty and Service Contract

a. Quantity one (1) Year – Extended Warranty and Service Contract (4th year after warranty included in base instrument CLIN 0001) to start after the warranty/contract in CLIN 3002. This service associated with this contract shall meet or exceed the initial one (1) year warranty included with the base instrument. To be clear, executing this option would result in NIST having a total of at least five (5) years of warranty and service.

System 3: Energy Dispersive X-ray Detector and Electron Backscatter Detector to be Installed on a Thermo Fisher Helios 5 UX FIB/SEM System

CLIN 0003: Energy dispersive x-ray detector and electron backscatter detector to be installed on a Thermo Fisher Helios 5 UX FIB/SEM system OPTION Description: A suite of two detectors (one EDS and one EBSD) to be installed on a Thermo Fisher Helios 5 UX dual beam focused ion beam/scanning electron microscope Quantity: one (1) Option Execution: Within 240 days of contract award

Technical Specifications:

A. Microscope Interface

a. All systems defined below shall be configured to interface with a Thermo Fisher Helios 5

UX FIB/SEM system (different from the FIB/SEM system in CLIN 0001).

b. The detector system(s) defined below shall include all software to integrate with the instrument system including, but not limited to:

1. Controlling the electron beam and ion beam (if required/appropriate)

2. Reading detector signals from the instrument

3. Controlling the instrument stage

4. Reading imaging metadata from the instrument

c. The EDS/EBSD system shall include all cables, flanges, and other hardware to interface with the microscope system

i. The EDS and EBSD detectors will be installed on the standard ports.

B. Additional Technical Specifications

a. The additional technical specifications of CLIN 0003 are identical to CLIN 0001 sections

CLIN 000301: Software Package to Improve EBSD Indexing OPTION

OPTION

Option Execution: Within 240 days after contract award

CLIN 000302: Software Package to Improve Production of Atom Probe Tomography Specimens

Description: Software package to provide crystallographic information during the focused ion beam preparation of atom probe tomography specimens

CLIN 000303: Software Package to Analyze Dislocations OPTION

CLIN 000304: Software Package to Classify Microstructures OPTION enables the automatic classification of microstructures in datasets, e.g. identifying phases of steel.

CLIN 000305: Software Package to Classify and Reconstruct Parent Microstructures OPTION undergone a displacive phase transformation

A. If not included in the base configuration, the Contractor shall provide a software package that can classify and reconstruct the parent microstructure after a displacive phase transformation.

CLIN 000306: Software Package to Calculate Material Elastic Properties OPTION

A. If not included in the base configuration, the Contractor shall provide a software package that can calculate the elastic properties of materials based on the EBSD orientation map.

CLIN 1003: Extended Warranty and Service Contract OPTION

Quantity: one (1)

Technical Specifications:

A. Extended Warranty and Service Contract

a. Quantity one (1) Year – Extended Warranty and Service Contract (1st year after warranty included in base system CLIN 0003). This service associated with this contract shall meet or exceed the initial one (1) year warranty included with the base detector system.

CLIN 2003: Extended Warranty and Service Contract OPTION

Quantity: one (1)

Technical Specifications:

A. Extended Warranty and Service Contract

a. Quantity one (1) Year – Extended Warranty and Service Contract (2nd year after warranty included in base system CLIN 0003) to start after the warranty/contract in CLIN 1003.

This service associated with this contract shall meet or exceed the initial one (1) year warranty included with the base instrument. To be clear, executing this option would

CLIN 3003: Extended Warranty and Service Contract OPTION

a. Quantity one (1) Year – Extended Warranty and Service Contract (3rd year after warranty included in base system CLIN 0003) to start after the warranty/contract in CLIN 2003.

This service associated with this contract shall meet or exceed the initial one (1) year

CLIN 4003: Extended Warranty and Service Contract OPTION microscope instrument Quantity: one (1)

Technical Specifications:

A. Extended Warranty and Service Contract

a. Quantity one (1) Year – Extended Warranty and Service Contract (4th year after warranty included in base instrument CLIN 0003) to start after the warranty/contract in CLIN 3003. This service associated with this contract shall meet or exceed the initial one (1) year warranty included with the base instrument. To be clear, executing this option would result in NIST having a total of at least five (5) years of warranty and service.

System 4 OPTION: Energy Dispersive X-ray Detector and Electron Backscatter Detector to be Installed on a Thermo Fisher Scios 2 FIB/SEM System

CLIN 0004: Energy dispersive x-ray detector and electron backscatter detector to be installed on a Thermo Fisher Scios 2 FIB/SEM system OPTION Description: A suite of two detectors (one EDS and one EBSD) to be installed on Thermo Fisher Scios 2 dual beam focused ion beam/scanning electron microscope Quantity: one (1) Option Execution: Within 240 days of contract award

Technical Specifications:

A. Microscope Interface

a. All systems defined below shall be configured to interface with a Thermo Fisher Scios 2 focused ion beam scanning electron microscope (FIB/SEM) system

b. The detector system(s) defined below shall include all software to integrate with the instrument system including, but not limited to:

1. Controlling the electron beam and ion beam (if required/appropriate)

2. Reading detector signals from the instrument

3. Controlling the instrument stage

4. Reading imaging metadata from the instrument

c. The EDS/EBSD system shall include all cables, flanges, and other hardware to interface with the microscope system.

i. The EDS and EBSD detectors will be installed on the standard ports.

B. Additional Technical Specifications

a. The additional technical specifications of CLIN 0004 are identical to CLIN 0001 sections

CLIN 000401 Software Package to Improve EBSD Indexing OPTION

CLIN 000402: Software Package to Improve Production of Atom Probe Tomography Specimens

Description: Software package to provide crystallographic information during the focused ion beam preparation of atom probe tomography specimens

CLIN 000403: Software Package to Analyze Dislocations OPTION

CLIN 000404: Software Package to Classify Microstructures OPTION

CLIN 000405: Software Package to Classify and Reconstruct Parent Microstructures OPTION undergone a displacive phase transformation

CLIN 000406: Software Package to Calculate Material Elastic Properties OPTION

CLIN 1004: Extended Warranty and Service Contract OPTION Description: One (1) year of extended warranty and service for the EDS/EBSD detector system Quantity: one (1)

Technical Specifications:

A. Extended Warranty and Service Contract

a. Quantity one (1) Year – Extended Warranty and Service Contract (1st year after warranty included in base system CLIN 0004). This service associated with this contract shall meet or exceed the initial one (1) year warranty included with the base detector system.

CLIN 2004: Extended Warranty and Service Contract OPTION

Quantity: one (1)

Technical Specifications:

A. Extended Warranty and Service Contract

a. Quantity one (1) Year – Extended Warranty and Service Contract (2nd year after warranty included in base system CLIN 0004) to start after the warranty/contract in CLIN 1004.

This service associated with this contract shall meet or exceed the initial one (1) year warranty included with the base instrument. To be clear, executing this option would

CLIN 3004: Extended Warranty and Service Contract OPTION

Quantity: one (1)

Technical Specifications:

A. Extended Warranty and Service Contract

a. Quantity one (1) Year – Extended Warranty and Service Contract (3rd year after warranty included in base system CLIN 0004) to start after the warranty/contract in CLIN 2004.

This service associated with this contract shall meet or exceed the initial one (1) year

CLIN 4004: Extended Warranty and Service Contract OPTION microscope instrument

a. Quantity one (1) Year – Extended Warranty and Service Contract (4th year after warranty included in base system CLIN 0004) to start after the warranty/contract in CLIN 3004.

This service associated with this contract shall meet or exceed the initial one (1) year result in NIST having a total of at least five (5) years of warranty and service.

IV. DELIVERABLES

a. System 1 – Energy Dispersive X-ray Detector and Electron Backscatter Detector to be

Installed on FIB/SEM System

Description Quantity or Format Due Date

Delivery of EDS/EBSD detectors instrument (CLIN 0001) and all hardware and software necessary for full operation following installation in the laboratory

One (1) 12 weeks after contract award

Manuals for the EDS/EBSD system and associated software

Number defined by the “Technical Specifications” Section and vendor proposal

12 weeks after contract award (with delivery of instrument)

Installation of the EDS/EBSD detectors

One (1) 14 weeks after contract award

Successful site acceptance testing One (1) 25 weeks after contract award

Training of NIST personnel at NIST, Boulder, CO

Two (2) days of training of NIST personnel

16 weeks after contract award

OPTION: CLIN 000101 – CLIN

000106

Various Software Options

One (1) 12 weeks after contract award (with delivery of detectors)

b. System 2 – Energy Dispersive X-ray Detector and Electron Backscatter Detector to be Installed on a SEM System

i. Note: These detectors are being installed on a microscope that has not yet been purchased. The Contractor shall coordinate with NIST to manage deliverable schedule after award.

Delivery of EDS/EBSD detectors instrument (CLIN 0002) and all hardware and software necessary for full operation following installation in the laboratory

One (1) 32 weeks after contract award

Manuals for the EDS/EBSD system and associated software

Number defined by the “Technical Specifications” Section and vendor proposal

32 weeks after contract award (with delivery of detectors)

Installation of the EDS/EBSD detectors

One (1) 34 weeks after contract award

Successful site acceptance testing One (1) 35 weeks after contract award

Training of NIST personnel at NIST, Boulder, CO

Two (2) days of training of NIST personnel

36 weeks after contract award

OPTION: CLIN 000201 – CLIN

000205

Various Software Options

One (1) 32 weeks after contract award (with delivery of

c. System 3 – Energy Dispersive X-ray Detector and Electron Backscatter Detector to be Installed on FIB/SEM System OPTION

i. Note: These detectors are being installed on a microscope that has not yet been purchased. The Contractor shall coordinate with NIST to manage deliverable schedule after award.

OPTION: CLIN 0003

Delivery of EDS/EBSD detectors instrument (CLIN 0003) and all hardware and software necessary for full operation following installation in the laboratory

One (1) 42 weeks after execution of option

OPTION: CLIN 0003

Manuals for the EDS/EBSD system and associated software

Number defined by the “Technical Specifications” Section and vendor proposal

42 weeks after execution of option (with delivery of

OPTION: CLIN 0003

Installation of the EDS/EBSD detectors

One (1) 44 weeks after execution of option

OPTION: CLIN 0003

Successful site acceptance testing

One (1) 46 weeks after execution of option

OPTION: CLIN 0003

Training of NIST personnel at NIST, Boulder, CO

Two (2) days of training of NIST personnel

46 weeks after execution of option (with delivery of detectors)

OPTION: CLIN 000301 – CLIN

000306

Various Software Options

One (1) 42 weeks after execution of option (with

d. System 4 OPTION – Energy Dispersive X-ray Detector and Electron Backscatter Detector to be Installed on a SEM System

i. Note: These detectors are being installed on a microscope that has been purchased but has not yet been installed. The Contractor shall coordinate with NIST to manage deliverable schedule after award.

OPTION: CLIN 0004

Delivery of EDS/EBSD detectors instrument (CLIN 0004) and all hardware and software necessary for full operation following installation in the laboratory

One (1) 12 weeks after execution of option

OPTION: CLIN 0004

Manuals for the EDS/EBSD system and associated software

Number defined by the “Technical Specifications” Section and vendor proposal

12 weeks after execution of option (with delivery of detectors)

OPTION: CLIN 0004

Installation of the EDS/EBSD detectors

One (1) 14 weeks after execution of option

OPTION: CLIN 0004

Successful site acceptance testing

One (1) 15 weeks after execution of option

OPTION: CLIN 0004

Training of NIST personnel at NIST, Boulder, CO

Two (2) days of training of NIST personnel

16 weeks after execution of option

OPTION: CLIN 000401 – CLIN

000406

Various Software Options

One (1) 12 weeks after execution of option (with

V. PLACE OF PERFORMANCE

All work shall be completed at the Contractor’s facility. Installation of the instrument and training shall be performed at the customer’s site, NIST, Boulder, Colorado.

VI. PERIOD OF PERFORMANCE

The period of performance shall be sixteen (16) months from award, plus four 12-month warranty options.

VII. DELIVERY TERMS

Delivery shall be F.O.B Destination and shall occur in accordance with the delivery due dates provided in the above table.

FOB Destination means: The contractor shall pack and mark the shipment in conformance with carrier requirements, deliver the shipment in good order and condition to the point of delivery specified in the purchase order, be responsible for any loss of and/or damage to the goods occurring before receipt and acceptance of the shipment by the consignee at the delivery point specified in the purchase order; and pay all charges to the specified point of delivery. The contractor shall deliver all CLINs to the loading dock at:

National Institute of Standards and Technology 325 Broadway Street, Building 81 Boulder, CO 80305

To be clear, delivery is not complete until the items have been placed inside of the laboratory room designated by a NIST representative. Delivery to a loading dock does not constitute a completed “Delivery”.

VIII. INSTALLATION

The systems indicated in CLIN 0001, CLIN 0002, CLIN 0003, and CLIN 0004 shall be installed by the Contractor and meet contract specifications no later than ninety (90) days after delivery. Installation, at a minimum, shall include uncrating/unpackaging of all equipment, rigging, set-up and connection of the system to all necessary utilities, gas lines, etc., demonstration of all specifications, and removal and disposal of all associated crating, packing materials, and associated debris. Onsite installation and demonstration shall be done at NIST, Boulder, CO - Building 81. All installation requirements are identified below:

IX. TRAINING

Training requirements for each instrument are defined above in CLINs 0001, 0002, 0003, and 0004. The training shall provide a thorough demonstration of all system/solution functions, maintenance, data administration, and basic troubleshooting. The training may be completed at NIST, Monday – Friday during the normal operating hours of 8:00 a.m. - 5:00 p.m. (with the exception of Federal holidays and unanticipated closures) immediately after installation and demonstration of specifications and must be completed no later than one hundred and eighty (180) days after installation.

X. INSPECTION & ACCEPTANCE

In addition to the inspection and acceptance terms articulated in 52.212-4, the Government reserves the right to perform such performance tests and evaluations as defined below to verify specified system performance. Such tests and evaluations, if performed, shall be conducted within the environment that the system is to be operated.

Factory Acceptance:

The Contractor shall perform operational tests on each unit in the factory to confirm proper operation and conformance with performance specifications defined herein.

Site Acceptance:

At the NIST site the Contractor shall demonstrate conformance with the Contractor’s standard acceptance criteria. NIST may request that the Contractor demonstrates any technical specification defined in the “Minimum Requirements” section of this document prior to acceptance.

NIST may choose at its discretion to forego this part of acceptance testing.

A visual inspection of the equipment will be performed by the NIST COR to identify surface defects or any form of indication that any equipment was damaged during transport to NIST. The Government shall have sole discretion to require repair or replacement of damaged and/or nonconforming supplies at no cost to the Government. The Government at any time prior to acceptance shall reject the equipment due to defects and/or nonconformance. The vendor is responsible for latent defects discovered any time after final inspection. However, the extent of its liability shall be prorated over the useful life of the equipment.

Ownership of the equipment shall transfer to NIST upon acceptance by the Government.

The Government will test, inspect, and accept or reject the equipment within thirty (30) days of the receipt of the equipment unless otherwise indicated above. The Government reserves the right to conduct quality assurance testing to confirm that a given instrument(s) meets the manufacturer’s and/or the Government’s performance specifications. It is anticipated that the equipment will meet all manufacturer’s specifications and/or the Government’s performance specifications identified in the most recent operations and maintenance manual for each piece of equipment and/or in this document.

XI. Warranty and Service:

One (1) year warranty (to cover parts, labor, and travel) is to be included with the base system specifications, CLINs 0001, 0002, 0003, and 0004. Additional option years of warranty or service agreements will be supplied in the quote as detailed in this document.

XII. PAYMENT SCHEDULE

Advance payment is not authorized. The Contractor must invoice in arrears according to the payment schedule. The Contractor shall be paid, in accordance with Net 30-day payment terms, upon receipt and acceptance of a proper invoice, in accordance with the following schedule:

1. 100% after installation and acceptance by the COR of fully installed system, AND

2. After the successful completion of the testing requirements set forth in this document under section set forth in this document, AND

3. After successful demonstration by the instrumentation that it performs IAW the technical requirements set forth in this document AND

4. After receiving an invoice submitted properly, IAW the purchase order terms and conditions.

NOTE: Partial shipments and partial invoices will not be accepted., unless otherwise requested and accepted by the Contracting Officer prior to award offer. Proposed payment schedules shall be submitted with vendor’s response to the RFQ for consideration.

XIII. GOVERNMENT FURNISHED PROPERTY

No government property will be furnished.

I. MISCELLANEOUS INFORMATION

Safety: The Contractor’s employees shall be responsible for knowing and complying with all best-practice installation procedures, protocols, and safety regulations. Such regulations include, but are not limited to, general safety, PPE, fire prevention, and waste disposal.

Security: NIST is a restricted campus. The contractor will conform with all appropriate requirements to gain permission to access the site.

Regular Business Hours. Regular business hours are Monday through Friday, 8:00 am to 5:00 pm) mountain time, excluding Federal holidays and NIST closures.

Identification Badges: Contractor’s employees must comply with NIST identification and access requirements. Each Contractor employee must wear a visible identification badge provided by the NIST Security Office and conform to the restrictions associated with the type of identification badge issued.

Vehicle Registration: All Contractor employees must register their vehicles with the NIST Security Office to gain access to the campus. Since requirements may change, the contractor will keep abreast of and conform with any updates prior to driving a vehicle onto the NIST campus.