RFQ_80NSSC19Q0630.docx

National Aeronautics and Space Administration NASA Shared Services Center Stennis Space Center, MS 39529-6000

6/10/2019

SUBJECT: Request for Quotation (RFQ) 80NSSC19Q0630, Electroplating Station for Silicon Wafers

This solicitation includes the following sections:

1. Statement of Work/Bid Schedule – Section 1

2. Instructions to Offerors – Section 2

3. Solicitation Provisions/Representations and Certifications – Section 3

4. Clauses/Terms and Conditions – Section 4

5. Quote Evaluation Criteria – Section 5

SECTION 1

STATEMENT OF WORK

Background

NASA Goddard Space Flight Center (GSFC) has a pressing need to produce detector arrays with electroplated absorbers. Films several micrometers in thickness are needed with low defect rate or incorporation of impurities for deposition onto 4” circular substrates. The films need to hit target thicknesses accurately and with suitable uniformity across the 4” substrate. The deposited film should have controllable film roughness with smooth films demonstrated. The deposited film resistivity at room temperature needs to approach the expected resistivity of the metal and show good performance at low temperature (typical reduction in the resistivity at room temperature by a factor of 10 at 4 Kelvin). These high performance thin films are incorporated into x-ray detectors planned for the NASA contribution to the x-ray detector for Athena and other missions and opportunities in x-ray astrophysics. Requirements for these detector arrays include high yield of arrays to enable rapid production of devices and prototypes. Issues such as non-uniform thickness across the substrate, non-reproducibility of film thickness and resistivity, and surface roughness of the film impact yield and specifications of the detector arrays. Control of the grain size in the deposited film is desired to achieve a range of film smoothness and electrical conductance suitable for these devices.

The electroplating system will be designed as a production level tool for a specific process (thick film Au electroplating) as well as be optimizable as a general purpose tool. To verify that the specific process will be accessible in the proposed tool, the proposers will need to provide references and other evidence to support their proposal as part of the award process.

While wafer throughput is often a specification on such tools, NASA’s need is not for the highest throughput but the best maintenance record in terms of ease of repair and minimized downtime. If the proposed equipment can do better than the requirements for uniformity, reproducibility or defect rate of the electroplated films on substrates, the vendor should indicate the ultimate capability of the system as this will be considered in the technical appraisal. Similarly, the proposer should comment on the maintenance record of fielded tools and suggested methods for maintaining the equipment in a user-maintained facility.

Objectives

Through this statement of work, NASA GSFC will obtain a system for electroplating metal films onto silicon wafers that achieves the specifications for high quality metal films including gold.

The specifications for the electroplating station to be obtained by NASA GSFC include requirements on performance of the tool and substrates to be accommodated.

· The electroplating station will be capable of plating wafers of 100 mm diameter and 300 micrometer thickness. Adapters for different wafer thicknesses – for example 500 micrometers thickness - should be available or easily produced upon request

· The electroplating station will be capable of heating the electroplating solution to target temperatures up to 70 C and maintain +/-1 C solution temperature uniformity at the wafer surface and during the wafer plating

· The electroplating station will be equipped with a pump or other method of circulating the solution

· The electroplating station will be provided with non-tarnishing electrical contacts for the wafer surface that are not immersed in the solution during plating

· The electroplating station will be provided with a power supply capable of pulsed application of high current density (up to 10 mA/square cm) to the wafer surface

· The electroplating station will be equipped with a container for the solution required approximately 1 gallon of electroplating solution for operation

· The electroplating station will be capable of adding agitation to the solution as needed to achieve desired film qualities.

· The electroplating station will be hardware controlled, programmable, and equipped with indicators for troubleshooting

NASA GSFC will obtain an electroplating station that is fully cleanroom compatible and compatible with the GSFC cleanroom facility including compatibility with all GSFC-provided utilities (power, compressed gases, chilled water) and safety requirements of the GSFC facility including SEMI S2 and NFPA 318 compliance.

NASA GSFC will obtain one year of support on the tool for achieving the specifications for the electroplating station as quoted by the vendor including improvements as needed to achieve the specifications.

NASA GSFC will obtain a one year warranty on the system for all parts and labor to maintain the functionality of the tool as delivered to GSFC.

Scope

The vendor shall design the electroplating station to meet the specifications described in the “Objectives” and “Task or Requirements” sections of this statement of work.

The vendor shall provide sufficient documentation of the design of the electroplating station to the NASA GSFC technical representative to gain approval of the design.

The vendor shall proceed with the build of the electroplating station after getting approval from the NASA GSFC representative.

The vendor shall complete building of the electroplating station at their facility and hold the system at their facility until the NASA GSFC technical representative accepts the tool for shipment to NASA GSFC.

The vendor shall provide references with similar tools installed in the field that can testify to tool functionality, specifications, and maintenance needs.

The vendor shall provide a tool that is compliant with SEMI S2 and NFPA 318 standards.

The vendor shall pack and ship the tool to NASA GSFC.

The vendor shall direct the installation of the tool at NASA GSFC. (Installation direction can be through provided instructions and phone consultation or, if needed, an in person visit from a vendor representative).

The vendor shall provide a system that is compliant with NASA GSFC safety requirements or can readily become compliant upon installation at NASA GSFC.

The vendor shall provide all manuals and documentation pertaining to the operation and maintenance of the tool and its subcomponents.

The vendor shall provide and support a warranty of all components on the tool. If the tool has difficulty reproducing the specifications once installed at GSFC, the vendor shall provide support on the tool to establish end user processes that achieve the target specifications of the electroplating station.

Tasks or Requirements

General

The vendor shall provide a system with all new construction and all new components. No refurbished equipment will be accepted. No refurbished components or subcomponents will be accepted.

The vendor shall provide an electroplating station meeting or exceeding specifications listed in the requirements below. The vendor shall prove through calculations and performance of past systems that the proposed system will meet all specifications.

System Configuration

The vendor shall provide a container for the electroplating solution equipped with circulating and agitation of the solution

The vendor shall provide a means of heating the solution to target temperatures and reading out the temperature of the solution near the wafer surface. The solution temperature shall be able to achieve temperatures up to 70 C with +/-1 degree C stability at the wafer surface and during the deposition.

All vendor-provided components to be installed in the container and including the container shall be compatible with electroplating chemistry including sulfite gold electroplating solution. The components should also be compatible with nitric acid solutions and sulfuric acid solutions used in cleaning.

The vendor shall provide a method of circulation and agitation of the electroplating solution in the container and at the wafer surface. The vendor installation shall provide a method of efficiently replenishing plating solution at the cathode boundary layer.

The vendor shall provide for filtration of the solution if desired for the plating chemistry

The vendor shall provide a system that is readily disassembled for cleaning

The vendor shall provide instructions on care of the electroplating station and cleaning and maintenance of subcomponents.

Vendor shall supply a Pt coated Nb metal mesh anode.

System shall be capable of forward and reverse pulsed plating and alternating between them on millisecond time scales.

Vendor shall supply a procedure to flush and clean the system thoroughly for storage when not in use.

Wafer mount and contacts

The vendor shall provide an electroplating station capable of depositing metal films on 4” wafers

The vendor shall provide a fixture for mounting the 4” silicon wafer and immersing it in the solution

The vendor shall provide a set of contacts for supplying current and voltage to the substrate. The contacts shall be non-tarnishing in the electroplating chemistry (sulfamate and nitric acid solutions as mentioned above) and be integrated into the wafer fixture in a way that promotes deposition of films of uniform thickness

The contacts and fixture shall be arranged such that the contacts are not immersed in the electroplating solution during plating

If contacts are arranged symmetrically around the wafer, the wafer mount shall have an o-ring contacting the surface of the silicon wafer to prevent leakage of the solution around the frontside contacts and to the back of the wafer.

If configured with an o-ring sealing to the surface, the o-ring dimension will permit plating on a diameter of at least 86 mm on the front surface of the wafer.

Power Supply

The vendor shall supply all power supplies and cabling needed to connect the power supply to the wafer fixture, enabling the system to electroplate silicon wafers in the electroplating station

The power supply shall be a pulsed DC current supply capable of current DC and pulse average of 0.1,1.0 and 3 Amps, current peak of 0.3, 3, and 6 amps, output voltage of 0-10 Volts

The power supply shall be capable of pulse timing of 4-digit realtime, on/off from 0.01 mS to 99 seconds

The power supply shall have a stability of +/- 1 mA and ripple of less than 1%

Performance

The electroplating station shall be capable of deposition of metal films (including Au films) of thicknesses of 0.5 to 10 microns.

The electroplating station shall achieve a thickness uniformity of +/- 3 % across the wafer surface with an exclusion zone of 10 mm from the edge of the 100 mm wafer

The electroplating station shall achieve a wafer-to-wafer reproducibility of 2% total thickness

The electroplating station shall achieve films of superior smoothness (surface roughness). For example, a 1 micron film should have a roughness of <1% (10 nm rms)

The electroplating station shall achieve dense electroplated films that achieve room temperature resistivity approaching the canonical value for the elemental film with a RRR (residual resistance ration between 300 and 4 K) of 10.

Options

The vendor shall provide options for electroplating of 6” and 8” wafers

The vendor shall provide a kit for all replaceable parts including clips, contacts, o-rings, and anodes.

Spare Parts

The vendor shall provide spare parts for the tool that are frequently required for changeout to maintain the tool.

The vendor shall provide a list of consumables such as gaskets and hardware that fit the system

Safety

The vendor shall provide an emergency power off switch that is clearly labeled and accessible to users, posted warnings of high temperature and chemical flammability and health hazard as needed for the system.

The vendor shall provide a tool that is SEMI S2 and NFPA 318 compliant.

Warranty

The vendor shall provide a one year warranty for all parts and labor for the tool and its components and subcomponents

Manuals

The vendor shall provide a full printed set of drawings of the tool, electronic schematics of the tool, and operation of the tool.

The vendor shall provide a parts list and operation and troubleshooting manuals for the components used in the tool

The vendor shall have three systems delivered and operating in the field with similar designs to the system described in their offer in the last five year period.

The vendor shall provide three references that can be contacted that can describe the system delivered by the vendor to their institution. The references may also be asked to speak to the usage of the equipment and its capabilities as well as the installation and training provided by the vendor at their facility.

Selection Criteria

Best technically acceptable.

Deliverables or Delivery Schedule

From Date of Award (DOA), the vendor shall provide a design for the system that meets the technical specifications. The design will include drawings of the proposed system as well as a parts list of all the components to be included in the system. (~ 1 month from DOA)

1.5 months from DOA: After approval of the design by the technical representative (which will take ~0.5 months), the vendor shall provide a schedule for the build of the tool and acquisition of the parts list.

2.5 months from DOA: At this point (roughly halfway through the build of the tool), vendor shall provide an update against the schedule to show how the work is progressing.

5 months from DOA: At this point, vendor shall have completed the build and assembly of the tool. If needed, the technical representative will visit the vendor facility to operate the tool to produce initial baseline samples and accept the tool. The technical representative may also obtain these samples by shipping wafers to the vendor to be electroplated and then returned.

6 months from DOA: One month after acceptance, the vendor shall have installed the tool at GSFC and trained GSFC personnel on the tool.

Government-Furnished Equipment and Government-Furnished Information

NASA GSFC will provide utilities and cleanroom space for installation of the tool per specifications provided by the vendor for electrical power, compressed gases, chilled water, and any other required facilities.

Security

None

Place of Performance

The design and construction of the tool will take place at the vendor facility. The initial technical acceptance of the tool, including operation of the tool to electroplate silicon wafers will be performed at the vendor facility. The tool with be packaged and shipped to NASA GSFC for installation. Training of personnel will also take place at NASA GSFC once the tool is installed.

Period of Performance

The period of performance for this statement of work is 6 months from the date of award.

Signature & Title Date

SECTION 2

INSTRUCTION TO OFFERORS

☒52.212-1 Instructions to Offerors – Commercial Items (Jan 2017) Addendum to 52.212-1

Quotes for the item(s) described in the RFQ are due by 6/14/2019 by 11:00 a.m. CT to Donna Martin at in order to be considered for award. If it is in the best interest of the Government, quotes submitted after the due date may be accepted. Quotes shall remain valid for 30 days unless otherwise expressly stated on the quote. Submitted Quotes shall list two points of contacts including name, phone number, and email address.

All contractual and technical questions must be in writing (e-mail) to Donna Martin at no later than 6/12/2019 by 11:00 a.m. CT. Telephone questions shall not be accepted.

The NAICS Code for this procurement is 332813.

This procurement is set aside for small business.

Offeror’s shall be registered at www.sam.gov in order to be considered for award.

Delivery is FOB Destination.

SECTION 3

SOLICITATION PROVISION/REPRESENTATIONS AND CERTIFICATIONS

☒52.252-1 SOLICITATION PROVISIONS INCORPORATED BY REFERENCE (FEB 1998)

This solicitation incorporates one or more solicitation provisions by reference, with the same force and effect as if they were given in full text. Upon request, the Contracting Officer will make their full text available. The offeror is cautioned that the listed provisions may include blocks that must be completed by the offeror and submitted with its quotation or offer. In lieu of submitting the full text of those provisions, the offeror may identify the provision by paragraph identifier and provide the appropriate information with its quotation or offer. Also, the full text of a solicitation provision may be accessed electronically at this/these address(es):

FAR http://farsite.hill.af.mil/vffara.htm NFS http://farsite.hill.af.mil/vfnasaa.HTM

FEDERAL ACQUISITIONI REGULATION (FAR) PROVISIONS INCORPORATED BY REFERENCE:

FAR PROVISISIONS IN FULL TEXT:

☒52.212-3 OFFEROR REPRESENTATIONS AND CERTIFICATIONS—COMMERCIAL ITEMS (NOV 2017)

The offeror shall complete only paragraphs (b) of this provision if the Offeror has completed the annual representations and certification electronically via the System for Award Management (SAM) Web site located at http://www.sam.gov/portal. If the Offeror has not completed the annual representations and certifications electronically, the Offeror shall complete only paragraphs (c) through (u) of this provision.

(a) Definitions. As used in this provision-- “Economically disadvantaged women-owned small business (EDWOSB) concern” means a small business concern that is at least 51 percent directly and unconditionally owned by, and the management and daily business operations of which are controlled by, one or more women who are citizens of the United States and who are economically disadvantaged in accordance with 13 CFR part 127. It automatically qualifies as a women-owned small business eligible under the WOSB Program.

“Forced or indentured child labor” means all work or service—

(6) Exacted from any person under the age of 18 under the menace of any penalty for its nonperformance and for which the worker does not offer himself voluntarily; or

(7) Performed by any person under the age of 18 pursuant to a contract the enforcement of which can be accomplished by process or penalties.

“Highest-level owner” means the entity that owns or controls an immediate owner of the offeror, or that owns or controls one or more entities that control an immediate owner of the offeror. No entity owns or exercises control of the highest level owner.

“Immediate owner” means an entity, other than the offeror, that has direct control of the offeror. Indicators of control include, but are not limited to, one or more of the following: Ownership or interlocking management, identity of interests among family members, shared facilities and equipment, and the common use of employees.

“Inverted domestic corporation,” means a foreign incorporated entity that meets the definition of an inverted domestic corporation under 6 U.S.C. 395(b), applied in accordance with the rules and definitions of 6 U.S.C. 395(c).

“Manufactured end product” means any end product in product and service codes (PSCs) 1000-9999, except—

(1) PSC 5510, Lumber and Related Basic Wood Materials;

(2) Product or Service Group (PSG) 87, Agricultural Supplies;

(3) PSG 88, Live Animals;

(4) PSG 89, Subsistence;

(5) PSC 9410, Crude Grades of Plant Materials;

(6) PSC 9430, Miscellaneous Crude Animal Products, Inedible;

(7) PSC 9440, Miscellaneous Crude Agricultural and Forestry Products;

(8) PSC 9610, Ores;

(9) PSC 9620, Minerals, Natural and Synthetic; and

(10) PSC 9630, Additive Metal Materials.

“Place of manufacture” means the place where an end product is assembled out of components, or otherwise made or processed from raw materials into the finished product that is to be provided to the Government. If a product is disassembled and reassembled, the place of reassembly is not the place of manufacture.

“Predecessor” means an entity that is replaced by a successor and includes any predecessors of the predecessor.

“Restricted business operations” means business operations in Sudan that include power production activities, mineral extraction activities, oil-related activities, or the production of military equipment, as those terms are defined in the Sudan Accountability and Divestment Act of 2007 (Pub. L. 110-174). Restricted business operations do not include business operations that the person (as that term is defined in Section 2 of the Sudan Accountability and Divestment Act of 2007) conducting the business can demonstrate—

(1) Are conducted under contract directly and exclusively with the regional government of southern Sudan;

(2) Are conducted pursuant to specific authorization from the Office of Foreign Assets Control in the Department of the Treasury, or are expressly exempted under Federal law from the requirement to be conducted under such authorization;

(3) Consist of providing goods or services to marginalized populations of Sudan;

(4) Consist of providing goods or services to an internationally recognized peacekeeping force or humanitarian organization;

(5) Consist of providing goods or services that are used only to promote health or education; or

(6) Have been voluntarily suspended.

Sensitive technology—

(1) Means hardware, software, telecommunications equipment, or any other technology that is to be used specifically—

(i) To restrict the free flow of unbiased information in Iran; or

(ii) To disrupt, monitor, or otherwise restrict speech of the people of Iran; and

(2) Does not include information or informational materials the export of which the President does not have the authority to regulate or prohibit pursuant to section 203(b)(3) of the International Emergency Economic Powers Act (50 U.S.C. 1702(b)(3)).

“Service-disabled veteran-owned small business concern”—

(1) Means a small business concern—

(i) Not less than 51 percent of which is owned by one or more service-disabled veterans or, in the case of any publicly owned business, not less than 51 percent of the stock of which is owned by one or more service-disabled veterans; and

(ii) The management and daily business operations of which are controlled by one or more service-disabled veterans or, in the case of a service-disabled veteran with permanent and severe disability, the spouse or permanent caregiver of such veteran.

(2) Service-disabled veteran means a veteran, as defined in 38 U.S.C. 101(2), with a disability that is service-connected, as defined in 38 U.S.C. 101(16).

“Small business concern” means a concern, including its affiliates, that is independently owned and operated, not dominant in the field of operation in which it is bidding on Government contracts, and qualified as a small business under the criteria in 13 CFR Part 121 and size standards in this solicitation.

“Small disadvantaged business concern, consistent with 13 CFR 124.1002,” means a small business concern under the size standard applicable to the acquisition, that--

(1) Is at least 51 percent unconditionally and directly owned (as defined at 13 CFR 124.105) by--

(i) One or more socially disadvantaged (as defined at 13 CFR 124.103) and economically disadvantaged (as defined at 13 CFR 124.104) individuals who are citizens of the United States; and

(ii) Each individual claiming economic disadvantage has a net worth not exceeding $750,000 after taking into account the applicable exclusions set forth at 13 CFR 124.104(c)(2); and

(2) The management and daily business operations of which are controlled (as defined at 13.CFR 124.106) by individuals, who meet the criteria in paragraphs (1)(i) and (ii) of this definition.

“Subsidiary” means an entity in which more than 50 percent of the entity is owned—

(1) Directly by a parent corporation; or

(2) Through another subsidiary of a parent corporation.

“Successor” means an entity that has replaced a predecessor by acquiring the assets and carrying out the affairs of the predecessor under a new name (often through acquisition or merger). The term “successor” does not include new offices/divisions of the same company or a company that only changes its name. The extent of the responsibility of the successor for the liabilities of the predecessor may vary, depending on State law and specific circumstances.

“Veteran-owned small business concern” means a small business concern—

(1) Not less than 51 percent of which is owned by one or more veterans(as defined at 38 U.S.C. 101(2)) or, in the case of any publicly owned business, not less than 51 percent of the stock of which is owned by one or more veterans; and

(2) The management and daily business operations of which are controlled by one or more veterans.

“Women-owned business concern” means a concern which is at least 51 percent owned by one or more women; or in the case of any publicly owned business, at least 51 percent of the its stock is owned by one or more women; and whose management and daily business operations are controlled by one or more women.

“Women-owned small business concern” means a small business concern --

(1) That is at least 51 percent owned by one or more women or, in the case of any publicly owned business, at least 51 percent of the stock of which is owned by one or more women; and

(2) Whose management and daily business operations are controlled by one or more women.

“Women-owned small business (WOSB) concern eligible under the WOSB Program (in accordance with 13 CFR part 127),” means a small business concern that is at least 51 percent directly and unconditionally owned by, and the management and daily business operations of which are controlled by, one or more women who are citizens of the United States.

(b)

(1) Annual Representations and Certifications. Any changes provided by the offeror in paragraph (b)(2) of this provision do not automatically change the representations and certifications posted on the SAMwebsite.

(2) The offeror has completed the annual representations and certifications electronically via the SAM website accessed through https://www.acquisition.gov. After reviewing the SAM database information, the offeror verifies by submission of this offer that the representation and certifications currently posted electronically at FAR 52.212-3, Offeror Representations and Certifications—Commercial Items, have been entered or updated in the last 12 months, are current, accurate, complete, and applicable to this solicitation (including the business size standard applicable to the NAICS code referenced for this solicitation), as of the date of this offer and are incorporated in this offer by reference (see FAR 4.1201), except for paragraphs ____________. [Offeror to identify the applicable paragraphs at (c) through (u) of this provision that the offeror has completed for the purposes of this solicitation only, if any. These amended representation(s) and/or certification(s) are also incorporated in this offer and are current, accurate, and complete as of the date of this offer. Any changes provided by the offeror are applicable to this solicitation only, and do not result in an update to the representations and certifications posted electronically on SAM.]

(c) Offerors must complete the following representations when the resulting contract is to be performed in the United States or its outlying areas. Check all that apply.

(1) Small business concern. The offeror represents as part of its offer that it [_] is, [_] is not a small business concern.

(2) Veteran-owned small business concern. [Complete only if the offeror represented itself as a small business concern in paragraph (c)(1) of this provision.] The offeror represents as part of its offer that it [_] is, [_] is not a veteran-owned small business concern.

(3) Service-disabled veteran-owned small business concern. [Complete only if the offeror represented itself as a veteran-owned small business concern in paragraph (c)(2) of this provision.] The offeror represents as part of its offer that it [_] is, [_] is not a service-disabled veteran-owned small business concern.

(4) Small disadvantaged business concern. [Complete only if the offeror represented itself as a small business concern in paragraph (c)(1) of this provision.] The offeror represents that it [_] is, [_] is not, a small disadvantaged business concern as defined in 13 CFR 124.1002.

(5) Women-owned small business concern. [Complete only if the offeror represented itself as a small business concern in paragraph (c)(1) of this provision.] The offeror represents that it [_] is, [_] is not a women-owned small business concern.

Note: Complete paragraphs (c)(8) and (c)(9) only if this solicitation is expected to exceed the simplified acquisition threshold.

(6) WOSB concern eligible under the WOSB Program. [Complete only if the offeror represented itself as a women-owned small business concern in paragraph (c)(5) of this provision.] The offeror represents that—

(i) It [_] is, [_] is not a WOSB concern eligible under the WOSB Program, has provided all the required documents to the WOSB Repository, and no change in circumstances or adverse decisions have been issued that affects its eligibility; and

(ii) It [_] is, [_] is not a joint venture that complies with the requirements of 13 CFR part 127, and the representation in paragraph (c)(6)(i) of this provision is accurate for each WOSB concern eligible under the WOSB Program participating in the joint venture. [The offeror shall enter the name or names of the WOSB concern eligible under the WOSB Program and other small businesses that are participating in the joint venture: _________.] Each WOSB concern eligible under the WOSB Program participating in the joint venture shall submit a separate signed copy of the WOSB representation.

(7) Economically disadvantaged women-owned small business (EDWOSB) concern. [Complete only if the offeror represented itself as a WOSB concern eligible under the WOSB Program in (c)(6) of this provision.] The offeror represents that—

(i) It [_] is, [_] is not an EDWOSB concern, has provided all the required documents to the WOSB Repository, and no change in circumstances or adverse decisions have been issued that affects its eligibility; and

(ii) It [_] is, [_] is not a joint venture that complies with the requirements of 13 CFR part 127, and the representation in paragraph (c)(7)(i) of this provision is accurate for each EDWOSB concern participating in the joint venture. [The offeror shall enter the name or names of the EDWOSB concern and other small businesses that are participating in the joint venture: _____________.] Each EDWOSB concern participating in the joint venture shall submit a separate signed copy of the EDWOSB representation.

(8) Women-owned business concern (other than small business concern). [Complete only if the offeror is a women-owned business concern and did not represent itself as a small business concern in paragraph (c)(1) of this provision.] The offeror represents that it [_] is, a women-owned business concern.

(9) Tie bid priority for labor surplus area concerns. If this is an invitation for bid, small business offerors may identify the labor surplus areas in which costs to be incurred on account of manufacturing or production (by offeror or first-tier subcontractors) amount to more than 50 percent of the contract price:

(10) HUBZone small business concern. [Complete only if the offeror represented itself as a small business concern in paragraph (c)(1) of this provision.] The offeror represents, as part of its offer, that--

(i) It [_] is, [_] is not a HUBZone small business concern listed, on the date of this representation, on the List of Qualified HUBZone Small Business Concerns maintained by the Small Business Administration, and no material changes in ownership and control, principal office, or HUBZone employee percentage have occurred since it was certified in accordance with 13 CFR part 126; and

(ii) It [_] is, [_] is not a HUBZone joint venture that complies with the requirements of 13 CFR part 126, and the representation in paragraph (c)(10)(i) of this provision is accurate for each HUBZone small business concern participating in the HUBZone joint venture. [The offeror shall enter the names of each of the HUBZone small business concerns participating in the HUBZone joint venture: __________.] Each HUBZone small business concern participating in the HUBZone joint venture shall submit a separate signed copy of the HUBZone representation.

(d) Representations required to implement provisions of Executive Order 11246 --

(1) Previous contracts and compliance. The offeror represents that --

(i) It [_] has, [_] has not, participated in a previous contract or subcontract subject to the Equal Opportunity clause of this solicitation; and

(ii) It [_] has, [_] has not, filed all required compliance reports.

(2) Affirmative Action Compliance. The offeror represents that --

(i) It [_] has developed and has on file, [_] has not developed and does not have on file, at each establishment, affirmative action programs required by rules and regulations of the Secretary of Labor (41 CFR parts 60-1 and 60-2), or

(ii) It [_] has not previously had contracts subject to the written affirmative action programs requirement of the rules and regulations of the Secretary of Labor.

(e) Certification Regarding Payments to Influence Federal Transactions (31 U.S.C. 1352). (Applies only if the contract is expected to exceed $150,000.) By submission of its offer, the offeror certifies to the best of its knowledge and belief that no Federal appropriated funds have been paid or will be paid to any person for influencing or attempting to influence an officer or employee of any agency, a Member of Congress, an officer or employee of Congress or an employee of a Member of Congress on his or her behalf in connection with the award of any resultant contract. If any registrants under the Lobbying Disclosure Act of 1995 have made a lobbying contact on behalf of the offeror with respect to this contract, the offeror shall complete and submit, with its offer, OMB Standard Form LLL, Disclosure of Lobbying Activities, to provide the name of the registrants. The offeror need not report regularly employed officers or employees of the offeror to whom payments of reasonable compensation were made.

(f) Buy American Certificate. (Applies only if the clause at Federal Acquisition Regulation (FAR) 52.225-1, Buy American – Supplies, is included in this solicitation.)

(1) The offeror certifies that each end product, except those listed in paragraph (f)(2) of this provision, is a domestic end product and that for other than COTS items, the offeror has considered components of unknown origin tohave been mined, produced, or manufactured outside the United States. The offeror shall list as foreign end products those end products manufactured in the United States that do not qualify as domestic end products, i.e., an end product that is not a COTS item and does not meet the component test in paragraph (2) of the definition of “domestic end product.” The terms “commercially available off-the-shelf (COTS) item,” “component,” “domestic end product,” “end product,” “foreign end product,” and “United States” are defined in the clause of this solicitation entitled “Buy American—Supplies.”

(2) Foreign End Products:

[List as necessary]

(3) The Government will evaluate offers in accordance with the policies and procedures of FAR Part 25.

(g)

(1) Buy American -- Free Trade Agreements -- Israeli Trade Act Certificate. (Applies only if the clause at FAR 52.225-3, Buy American -- Free Trade Agreements -- Israeli Trade Act, is included in this solicitation.)

(i) The offeror certifies that each end product, except those listed in paragraph (g)(1)(ii) or (g)(1)(iii) of this provision, is a domestic end product and that for other than COTS items, the offeror has considered components of unknown origin to have been mined, produced, or manufactured outside the United States. The terms “Bahrainian, Moroccan, Omani, Panamanian, or Peruvian end product,” “commercially available off-the-shelf (COTS) item,” “component,” “domestic end product,” “end product,” “foreign end product,” “Free Trade Agreement country,” “Free Trade Agreement country end product,” “Israeli end product,” and “United States” are defined in the clause of this solicitation entitled “Buy American--Free Trade Agreements--Israeli Trade Act.”

(ii) The offeror certifies that the following supplies are Free Trade Agreement country end products (other than Bahrainian, Moroccan, Omani, Panamanian, or Peruvian end products) or Israeli end products as defined in the clause of this solicitation entitled “Buy American—Free Trade Agreements—Israeli Trade Act”:

Free Trade Agreement Country End Products (Other than Bahrainian, Moroccan, Omani, Panamanian, or Peruvian End Products) or Israeli End Products:

(iii) The offeror shall list those supplies that are foreign end products (other than those listed in paragraph (g)(1)(ii) or this provision) as defined in the clause of this solicitation entitled “Buy American—Free Trade Agreements—Israeli Trade Act.” The offeror shall list as other foreign end products those end products manufactured in the United States that do not qualify as domestic end products, i.e., an end product that is not a COTS item and does not meet the component test in paragraph (2) of the definition of “domestic end product.”

Other Foreign End Products:

(iv) The Government will evaluate offers in accordance with the policies and procedures of FAR Part 25.

(2) Buy American—Free Trade Agreements—Israeli Trade Act Certificate, Alternate I. If Alternate I to the clause at FAR 52.225-3 is included in this solicitation, substitute the following paragraph (g)(1)(ii) for paragraph (g)(1)(ii) of the basic provision:

(g)(1)(ii) The offeror certifies that the following supplies are Canadian end products as defined in the clause of this solicitation entitled “Buy American—Free Trade Agreements—Israeli Trade Act”:

Canadian End Products:

Line Item No.:

[List as necessary]

(3) Buy American—Free Trade Agreements—Israeli Trade Act Certificate, Alternate II. If Alternate II to the clause at FAR 52.225-3 is included in this solicitation, substitute the following paragraph (g)(1)(ii) for paragraph (g)(1)(ii) of the basic provision:

(g)(1)(ii) The offeror certifies that the following supplies are Canadian end products or Israeli end products as defined in the clause of this solicitation entitled “Buy American--Free Trade Agreements--Israeli Trade Act'':

Canadian or Israeli End Products:

(4) Buy American—Free Trade Agreements—Israeli Trade Act Certificate, Alternate III. If Alternate III to the clause at 52.225-3 is included in this solicitation, substitute the following paragraph (g)(1)(ii) for paragraph (g)(1)(ii) of the basic provision:

(g)(1)(ii) The offeror certifies that the following supplies are Free Trade Agreement country end products (other than Bahrainian, Korean, Moroccan, Omani, Panamanian, or Peruvian end products) or Israeli end products as defined in the clause of this solicitation entitled “Buy American—Free Trade Agreements—Israeli Trade Act”:

Free Trade Agreement Country End Products (Other than Bahrainian, Korean, Moroccan, Omani, Panamanian, or Peruvian End Products) or Israeli End Products:

(5) Trade Agreements Certificate. (Applies only if the clause at FAR 52.225-5, Trade Agreements, is included in this solicitation.)

(i) The offeror certifies that each end product, except those listed in paragraph (g)(5)(ii) of this provision, is a U.S.-made or designated country end product as defined in the clause of this solicitation entitled “Trade Agreements.”

(ii) The offeror shall list as other end products those end products that are not U.S.-made or designated country end products.

Other End Products

(iii) The Government will evaluate offers in accordance with the policies and procedures of FAR Part 25. For line items covered by the WTO GPA, the Government will evaluate offers of U.S.-made or designated country end products without regard to the restrictions of the Buy American statute. The Government will consider for award only offers of U.S.-made or designated country end products unless the Contracting Officer determines that there are no offers for such products or that the offers for such products are insufficient to fulfill the requirements of the solicitation.

(h) Certification Regarding Responsibility Matters (Executive Order 12689). (Applies only if the contract value is expected to exceed the simplified acquisition threshold.) The offeror certifies, to the best of its knowledge and belief, that the offeror and/or any of its principals--

(1) [_] Are, [_] are not presently debarred, suspended, proposed for debarment, or declared ineligible for the award of contracts by any Federal agency;

(2) [_] Have, [_] have not, within a three-year period preceding this offer, been convicted of or had a civil judgment rendered against them for: commission of fraud or a criminal offense in connection with obtaining, attempting to obtain, or performing a Federal, state or local government contract or subcontract; violation of Federal or state antitrust statutes relating to the submission of offers; or commission of embezzlement, theft, forgery, bribery, falsification or destruction of records, making false statements, tax evasion, violating Federal criminal tax laws, or receiving stolen property; and

(3) [_] Are, [_] are not presently indicted for, or otherwise criminally or civilly charged by a Government entity with, commission of any of these offenses enumerated in paragraph (h)(2) of this clause; and

(4) [_] Have, [_] have not, within a three-year period preceding this offer, been notified of any delinquent Federal taxes in an amount that exceeds $3,500 for which the liability remains unsatisfied.

(i) Taxes are considered delinquent if both of the following criteria apply:

(A) The tax liability is finally determined. The liability is finally determined if it has been assessed. A liability is not finally determined if there is a pending administrative or judicial challenge. In the case of a judicial challenge to the liability, the liability is not finally determined until all judicial appeal rights have been exhausted.

(B) The taxpayer is delinquent in making payment. A taxpayer is delinquent if the taxpayer has failed to pay the tax liability when full payment was due and required. A taxpayer is not delinquent in cases where enforced collection action is precluded.

(ii) Examples.

(A) The taxpayer has received a statutory notice of deficiency, under I.R.C. §6212, which entitles the taxpayer to seek Tax Court review of a proposed tax deficiency. This is not a delinquent tax because it is not a final tax liability. Should the taxpayer seek Tax Court review, this will not be a final tax liability until the taxpayer has exercised all judicial appear rights.

(B) The IRS has filed a notice of Federal tax lien with respect to an assessed tax liability, and the taxpayer has been issued a notice under I.R.C. §6320 entitling the taxpayer to request a hearing with the IRS Office of Appeals Contesting the lien filing, and to further appeal to the Tax Court if the IRS determines to sustain the lien filing. In the course of the hearing, the taxpayer is entitled to contest the underlying tax liability because the taxpayer has had no prior opportunity to contest the liability. This is not a delinquent tax because it is not a final tax liability. Should the taxpayer seek tax court review, this will not be a final tax liability until the taxpayer has exercised all judicial appeal rights.

(C) The taxpayer has entered into an installment agreement pursuant to I.R.C. §6159. The taxpayer is making timely payments and is in full compliance with the agreement terms. The taxpayer is not delinquent because the taxpayer is not currently required to make full payment.

(D) The taxpayer has filed for bankruptcy protection. The taxpayer is not delinquent because enforced collection action is stayed under 11 U.S.C. §362 (the Bankruptcy Code).

(i) Certification Regarding Knowledge of Child Labor for Listed End Products (Executive Order 13126). [The Contracting Officer must list in paragraph (i)(1) any end products being acquired under this solicitation that are included in the List of Products Requiring Contractor Certification as to Forced or Indentured Child Labor, unless excluded at 22.1503(b).]

(1) Listed End Product

(2) Certification. [If the Contracting Officer has identified end products and countries of origin in paragraph (i)(1) of this provision, then the offeror must certify to either (i)(2)(i) or (i)(2)(ii) by checking the appropriate block.] [_] (i) The offeror will not supply any end product listed in paragraph (i)(1) of this provision that was mined, produced, or manufactured in the corresponding country as listed for that product.

[_] (ii) The offeror may supply an end product listed in paragraph (i)(1) of this provision that was mined, produced, or manufactured in the corresponding country as listed for that product. The offeror certifies that is has made a good faith effort to determine whether forced or indentured child labor was used to mine, produce, or manufacture any such end product furnished under this contract. On the basis of those efforts, the offeror certifies that it is not aware of any such use of child labor.

(j) Place of manufacture. (Does not apply unless the solicitation is predominantly for the acquisition of manufactured end products.) For statistical purposes only, the offeror shall indicate whether the place of manufacture of the end products it expects to provide in response to this solicitation is predominantly—

(1) [_] In the United States (Check this box if the total anticipated price of offered end products manufactured in the United States exceeds the total anticipated price of offered end products manufactured outside the United States); or

(2) [_] Outside the United States.

(k) Certificates regarding exemptions from the application of the Service Contract Labor Standards. (Certification by the offeror as to its compliance with respect to the contract also constitutes its certification as to compliance by its subcontractor if it subcontracts out the exempt services.) [The contracting officer is to check a box to indicate if paragraph (k)(1) or (k)(2) applies.]

(1) [_] Maintenance, calibration, or repair of certain equipment as described in FAR 22.1003-4(c)(1). The offeror [_] does [_] does not certify that—

(i) The items of equipment to be serviced under this contract are used regularly for other than Governmental purposes and are sold or traded by the offeror (or subcontractor in the case of an exempt subcontract) in substantial quantities to the general public in the course of normal business operations;

(ii) The services will be furnished at prices which are, or are based on, established catalog or market prices (see FAR 22.1003-4(c)(2)(ii)) for the maintenance, calibration, or repair of such equipment; and

(iii) The compensation (wage and fringe benefits) plan for all service employees performing work under the contract will be the same as that used for these employees and equivalent employees servicing the same equipment of commercial customers.

(2) [_] Certain services as described in FAR 22.1003-4(d)(1). The offeror [_] does [_] does not certify that—

(i) The services under the contract are offered and sold regularly to non-Governmental customers, and are provided by the offeror (or subcontractor in the case of an exempt subcontract) to the general public in substantial quantities in the course of normal business operations;

(ii) The contract services will be furnished at prices that are, or are based on, established catalog or market prices (see FAR 22.1003-4(d)(2)(iii));

(iii) Each service employee who will perform the services under the contract will spend only a small portion of his or her time (a monthly average of less than 20 percent of the available hours on an annualized basis, or less than 20 percent of available hours during the contract period if the contract period is less than a month) servicing the Government contract; and

(iv) The compensation (wage and fringe benefits) plan for all service employees performing work under the contract is the same as that used for these employees and equivalent employees servicing commercial customers.

(3) If paragraph (k)(1) or (k)(2) of this clause applies—

(i) If the offeror does not certify to the conditions in paragraph (k)(1) or (k)(2) and the Contracting Officer did not attach a Service Contract Labor Standards wage determination to the solicitation, the offeror shall notify the Contracting Officer as soon as possible; and

(ii) The Contracting Officer may not make an award to the offeror if the offeror fails to execute the certification in paragraph (k)(1) or (k)(2) of this clause or to contact the Contracting Officer as required in paragraph (k)(3)(i) of this clause.

(l) Taxpayer identification number (TIN) (26 U.S.C. 6109, 31 U.S.C. 7701). (Not applicable if the offeror is required to provide this information to the SAM database to be eligible for award.)

(1) All…