Tab_4_PR629300_SOW.pdf

Statement of Work: Microanalysis system with Silicon Drift Detector for FE-SEM

We are looking to purchase microanalysis systems for our Hitachi S-4700 FE-SEMS. System shall meet or exceed specifications for the AZtecEnergy Standard Microanalysis System with X-MaxN 20 large area Analytical Silicon Drift Detector. One system must include large area mapping capability (for the 2003 Hitachi S-4700).

Microanalysis system shall meet or exceed:

• Be compatible with Hitachi S-4700 (1997, serial 5703-03 and 2003, serial 6059-03)

• Silicon Drift Detector size of at least 20mm2

• Excellent low energy analysis, including detection of Be and above

• Solid angle of 0.00626sr or greater

• Resolution specs shown at installation (FWHM) in accordance with ISO15632:2002 o Mn Ka – 127eV at 50kcps o F Ka – 58eV at 50kcps o C Ka – 56eV at 50kcps

• Ability to acquire images up to 8k x 8k resolution.

• Can acquire multiple electron images for region of interest.

o Collect multiple fields over large map areas, set up though intelligent set up wizard o Designed for flat and tilted samples, both stage tilt and pre-tilt o Collect up to 1500 individual maps, at up to 4k x4k EBSD resolution and align o them automatically o Field alignment through image correlation routine o Montage into a single dataset with up to 64 million data points o Investigate montage data as a single site of interest

• Incorporates Filtered Least Squares spectrum processing without the user making background fitting adjustments

• Utilizes XPP matrix correction

• Can perform un-normalized quantitative spectrum analysis.

• Can automatically correct for non-linearity of peak resolution and position.

• Sum peak correction not only eliminates sum peaks, but replaces counts to the corresponding component peaks in the spectrum.

• Ability to collect element maps at resolutions up to 4k x 4k.