SOW Updated.pdf

STATEMENT OF WORK

Time-resolved emission microscopy for circuit evaluation and failure analysis

686.10 (Applied Physics Division, Quantum Nanophotonics Group)

I. BACKGROUND INFORMATION

The semiconductor supply chain is global, specialized, and interconnected. Chipmakers do business with thousands of individual suppliers that provide the highly complex materials and tools used to produce semiconductors. To address the lack of full visibility into the semiconductors markets supply chain and R&D ecosystem gaps NIST will conduct the measurement science, or metrology, critical to the development of new materials, packaging, and production methods in chip manufacturing.

We are purchasing a near-infrared microscope with components tailored for the spectral range between 1.3µm and 2.3µm. This will used in a laboratory environment at ambient temperature and pressure. It will be placed on an optical table. The microscope will be used to inspect semiconductor integrated circuits and to collect emission from hot carriers excited when transistors switch their state. The goal is to understand the emitted light so it can be used for circuit evaluation and failure analysis. The mission of CHIPS is to develop metrology capabilities that advance the semiconductor industry. By measuring the faint, infrared emission from active transistors, we can better understand how this light can be used for circuit evaluation and failure analysis, and therefore develop the capability in service of the US semiconductor industry.

II. SCOPE

The goal of this contract is to obtain one microscope with visible-light illumination, at least one objective for visible light imaging, and at least two objectives for collecting near-infrared light at wavelengths between 1.3µm and 2.3µm. Collecting light at longer wavelengths is also desirable. The microscope must have ports for directing the collected emission to free space or to optical fibers.

III. MINIMUM REQUIREMENTS

We require a microscope with a 100x objective with a numerical aperture of 0.6 with transmission between 1.3µm and 2.3µm with greater than 50% efficiency. It must have ports to enable coupling near-infrared light to free space or an optical fiber.

Line Item 0001:

Description: Time-resolved emission microscopy Quantity: 1

A. Technical Specifications

a. Objectives

i. 100x Visible objective, Numerical aperture of 0.9

ii. 100x NIR objective, Numerical aperture of 0.85

iii. 20x NIR objective, Numerical aperture of 0.45

iv. 10x Visible objective, Numerical aperture of 0.25

v. 5x NIR objective, Numerical aperture of 0.1

b. Transmission between 1.3µm and 2.3µm with greater than 50%

c. Ports to enable coupling near-infrared light to free space or an optical fiber

IV. DELIVERABLES

V. PLACE OF PERFORMANCE

a. NIST, Boulder, CO, Building 1, room 3349.

VI. DELIVERY TERMS

Delivery shall be F.O.B Destination and shall occur in accordance with the delivery due dates provided in the above table.

FOB Destination means: The contractor shall pack and mark the shipment in conformance with carrier requirements, deliver the shipment in good order and condition to the point of delivery specified in the purchase order, be responsible for any loss of and/or damage to the goods occurring before receipt and acceptance of the shipment by the consignee at the delivery point specified in the purchase order; and pay all charges to the specified point of delivery. The contractor shall deliver all Line Items to:

DOC/NIST

Shipping & Receiving 325 Broadway Boulder, CO, 80305

VII. INSPECTION & ACCEPTANCE

In addition to the inspection and acceptance terms articulated in 52.212-4, the Government reserves the right to perform such performance tests and evaluations as defined below to verify specified system performance. Such tests and evaluations, if performed, shall be conducted within the environment that the system is to be operated. The Contractor has the right to be present during the tests and evaluations, if performed, at the Contractor’s expense.

Performance Tests:

1. Insertion loss through free-space and fiber ports

2. Spatial resolution

3. Wavelength range of operation

NIST may choose at its discretion to forego this part of acceptance testing.

A visual inspection of the equipment will be performed by the NIST COR to identify surface defects or any form of indication that any equipment was damaged during transport to NIST. The Government shall have sole discretion to require repair or replacement of damaged and/or nonconforming supplies at no cost to the

Milestone Description Due Date Format

1 time resolved emission microscope and ports

60 days ARO n/a

Government. The Government at any time prior to acceptance shall reject the equipment due to defects and/or nonconformance. The vendor is responsible for latent defects discovered any time after final inspection. However, the extent of its liability shall be prorated over the useful life of the equipment.

Ownership of the equipment shall transfer to NIST upon acceptance by the Government.

The Government will test, inspect, and accept or reject the equipment within 30 days of the receipt of the equipment unless otherwise indicated above. The Government reserves the right to conduct quality assurance testing to confirm that a given instrument(s) meets the manufacturer’s and/or the Government’s performance specifications. It is anticipated that the equipment will meet all manufacturer’s specifications and/or the Government’s performance specifications identified in the most recent operations and maintenance manual for each piece of equipment and/or in this document.

VIII. WARRANTY

The contractor shall warranty the entire system for a period of a minimum of 1 year after receipt of the equipment and shall be in accordance with terms in FAR 52.212-4. Warranty shall commence upon acceptance of the system by the Government and at a minimum shall include the following:

All parts working as described with the specified insertion loss, spectral range of operation, and transmission, and spatial resolution.

IX. PAYMENT SCHEDULE

Advance payment is not authorized. The Contractor must invoice in arrears according to the payment schedule. The Contractor shall be paid, in accordance with Net 30-day payment terms, upon receipt and acceptance of a proper invoice, in accordance with the following schedule:

Successful Delivery, Inspection and Acceptance

100%

NOTE: Partial shipments and partial invoices will not be accepted, unless otherwise requested and accepted by the Contracting Officer prior to award offer. Proposed payment schedules shall be submitted with vendor’s response to the RFQ for consideration.

X. CONTRACTOR SUPPLIED MATERIALS

a. The contractor shall supply all parts, hardware, equipment, and labor required to perform the tasks listed.