Requirements.docx

STATEMENT OF WORK

Nanocalorimetry for Semiconductors and Semiconductor Process Metrology

MML/MMSD (643.09)

BACKGROUND INFORMATION

The success of US semiconductor manufacturing relies on the ability of the industry to out innovate competitors with new technology and outperform foreign manufacturers with high-yield processing. NIST’s CHIPS Metrology program is tasked with assisting industry by creating new measurement capabilities that enable the development of next generation devices and help manufacturers with metrology solutions that improve the yield of manufacturing processes. The Nanocalorimetry for Semiconductors and Semiconductor Process Metrology project is addressing this need by developing bespoke sensors, instrument control systems, and calibration and model verifications methods. These sensors measure the thermal properties of thin film semiconductor materials, can perform experiments at time scales applicable to the operations of semiconductor devices, and are being investigated for integration into processing tools for plasma and atomic layer deposition processes. Adapting these sensors for real-time high-speed closed loop control requires new data acquisition (DAQ) hardware including field programmable gate array (FPGA) controlled systems. FPGAs allow for input signals to digitized, processed to allow decision making, and then set new output values with significantly lower latency than tradition DAQ systems that communicate through the control PCs operating system for processing and decision making.

SCOPE

The contractor will deliver two (2) National Instruments PXIe data acquisition systems with the specified component list below under the minimum requirements. The systems can be delivered to NIST as separate components, or the contractor may install the modular components into the chassis before delivery.

MINIMUM REQUIREMENTS

The Contractor shall provide a system that meets all technical specifications identified below. All items must be new. Used or remanufactured equipment will not be considered for award. Experimental, prototype, or custom items will not be considered. The use of “gray market” components are not authorized for sale in the U.S. by the Contractor is not acceptable. All line items shall be shipped in the original manufacturer’s packaging and include all original documentation and software, when applicable.

Technical Specifications:

A. Must include TPM 2.0 B. Must include at least a 512 GB SSD C. Must Include at least 16 GB of RAM (788899-01)

Technical Specifications A. Must include digital IO cable (1 m length): (SHC68-C68-RDIO2 156166-01) B. Must include analog input cable (1 m length): (SHC68-C68-D3 188143-01) C. Must include analog output cable (1 m length): (SHC68-C68-D4 196275-01)

Technical Specifications A. Must include external power adapter and cable (763000-01)

Technical Specifications A. Must include US power cable (763830-01)

Technical Specifications A. No additional requirements

DELIVERY TERMS

Delivery shall be F.O.B Destination or equivalent Incoterms, such as Delivered Duties Paid (DDP) for non-domestic shipments and shall occur not later than 90 days after award.

FOB Destination means: The contractor shall pack and mark the shipment in conformance with carrier requirements, deliver the shipment in good order and condition to the point of delivery specified in the purchase order (NIST Dock), be responsible for any loss of and/or damage to the goods occurring before receipt and acceptance of the shipment by the consignee at the delivery point specified in the purchase order; and pay all charges to the specified point of delivery (NIST Dock) . The contractor shall deliver all Line Items to:

DOC/NIST

Shipping & Receiving 100 Bureau Dr.

Attn: Will Osborn (Technical Point of Contact) Gaithersburg, MD 20899

INSPECTION & ACCEPTANCE

In addition to the inspection and acceptance terms articulated in 52.212-4, the Government reserves the right to perform such performance tests and evaluations as defined below to verify specified system performance. Such tests and evaluations, if performed, shall be conducted within the environment that the system is to be operated. The Contractor has the right to be present during the tests and evaluations, if performed, at the Contractor’s expense.

Performance Tests:

1. Controller and modules will be installed in the chassis and powered on to boot into Windows 10.

2. The modules will be verified as present, functional, and successfully passing self-calibration in NI MAX.

3. Analog output from the PXIe-7890 will be digitized using both the PXIe-7890 analog input and NIST owned oscilloscope. The voltage and time-base of the waveform will be validated against manufacturer’s specifications.

4. Voltage output from the PXIe-4112 will be tested using a NIST owned DC electronic load and multimeter to validate the module’s output against manufacturer’s specification.

NIST may choose at its discretion to forego this part of acceptance testing.

A visual inspection of the equipment will be performed by the NIST TPOC to identify surface defects or any form of indication that any equipment was damaged during transport to NIST. The Government shall have sole discretion to require repair or replacement of damaged and/or nonconforming supplies at no cost to the Government. The Government at any time prior to acceptance shall reject the equipment due to defects and/or nonconformance. The vendor is responsible for latent defects discovered any time after final inspection. However, the extent of its liability shall be prorated over the useful life of the equipment.

Ownership of the equipment shall transfer to NIST upon acceptance by the Government.

The Government will test, inspect, and accept or reject the equipment within 10 working days of the receipt of the equipment unless otherwise indicated above. The Government reserves the right to conduct quality assurance testing to confirm that a given instrument(s) meets the manufacturer’s and/or the Government’s performance specifications. It is anticipated that the equipment will meet all manufacturer’s specifications and/or the Government’s performance specifications identified in the most recent operations and maintenance manual for each piece of equipment and/or in this document.

WARRANTY

The contractor shall warranty the entire system for a period of a minimum of 1 year after receipt of the equipment and shall be in accordance with terms in FAR 52.212-4. Warranty shall commence upon acceptance of the system by the Government and must match the warranty terms of the original equipment manufacturer. The contractor may elect to have warranty services provided by the original equipment manufacturer (National Instruments).

PAYMENT SCHEDULE:

The Contractor shall be paid, in accordance with Net 30-day payment terms, upon receipt and acceptance of a proper invoice, in accordance with the following schedule:

100% upon receipt of all equipment, completion of performance/acceptance testing and final approval by the COR.

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