The National Science Foundation (NSF) awarded a $305,000 Small Business Innovation Research (SBIR) Phase I project grant to Stellar Engine, a for-profit organization, to develop an advanced plasma-enhanced atomic layer deposition (PEALD) processing technology using nanosecond pulse power. The technology aims to produce super-thin, high-quality coatings for advanced semiconductor chip manufacturing by utilizing controlled bursts of electricity to enhance coating conformality, eliminate processing steps, lower costs, and reduce energy usage. The Phase I project will involve characterizing an array of micro-plasma applicators, defining specifications for a nanosecond high-voltage pulsed generator, and testing 75mm diameter ceramic-metal arrays to demonstrate the PEALD process. The overall goal is to provide a new solution to semiconductor plasma processing that addresses the limitations of current PEALD methods. The award falls under the NSF Technology, Innovation, and Partnerships (TIP) program (CFDA 47.084), which supports early-stage research and development of innovative technologies with potential for societal and economic impact.
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