This $380,000 federal Project Grant award from the National Science Foundation (NSF) Division of Chemistry (CFDA 47.049 - Mathematical and Physical Sciences) supports Professor Gregory S. Girolami of the University of Illinois at Urbana-Champaign to develop new and better molecular precursors for the chemical vapor deposition (CVD) of thin films. The key focus areas include synthesizing novel transition metal complexes containing chelating borohydride ligands, investigating their chemical reactivity and volatility, and studying their utility as CVD precursors. This research aims to enable improved materials and fabrication methods for continued miniaturization of integrated circuits, contributing to the microelectronics industry. The award period runs from November 15, 2024 to October 31, 2027. No sub-awards are planned under this grant.
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