Project Grant 2212981
- This National Science Foundation project grant of $728,692 supports research at the University of California, Los Angeles from September 2022 through August 2025 under the Engineering program (CFDA 47.041). The university will develop machine learning methods to model the dynamic structures of platinum and nickel nanoparticles containing 20 to 200 atoms and their effects on dehydrogenation and hydrogenolysis reactions. Researchers will generate accurate interatomic potentials using neural...
- This $466,735 Project Grant award from the National Science Foundation (NSF) Engineering program (CFDA 47.041) supports fundamental research to develop an electron beam-activated atomic layer etching (EB-ALE) process for advanced materials manufacturing. The primary objectives are to obtain the required knowledge on the surface chemical and physical aspects of the EB-ALE mechanism, and to enable layer-by-layer etching for critical applications involving complex multi-element materials that are...
- This $350,026 Project Grant award from the National Science Foundation's (NSF) Engineering program (CFDA 47.041) supports research at the University of California, Los Angeles (UCLA) to address the sustainable use of etch gases in semiconductor manufacturing. The research aims to provide knowledge to discover and use novel environmentally friendly etch gases and break them down to minimize emissions. The findings are intended to benefit the U.S. economy, environment, and society, and will be...
- The National Science Foundation awarded a $299,999 Project Grant to the California Institute of Technology from the Engineering program (CFDA 47.041) to support research in atomic-layer etching manufacturing processes for high-performance superconducting quantum devices. This two-year award will fund the development of atomic layer etching techniques to precisely engineer the surfaces of dielectric and metallic films used in superconducting quantum circuits. By enabling manufacturing with atomic...
- This Project Grant award, provided by the National Science Foundation's Division of Chemistry under the Mathematical and Physical Sciences program (CFDA 47.049), will support research by Professor Francisco Zaera of the University of California, Riverside to improve the quality of thin metal films grown using atomic layer deposition (ALD) techniques. The $390,000 award, spanning 2025-2027, will focus on developing new surface preconditioning methods to control the size and density of metal...
- The National Science Foundation (NSF) awarded a $528,664 Project Grant to the University of California, Los Angeles (UCLA) through the NSF Engineering program (CFDA 47.041) to conduct fundamental research on the thermodynamics and reaction-transport kinetics of copper-based catalysts for electrochemical transformation of carbon dioxide (CO2) into fuels and chemicals. The 5-year research project aims to develop a novel reaction-transport model for CO2 electrocatalysis that can enable the rational...
- This National Science Foundation project grant of $343,615 supports research at the University of Nebraska-Lincoln into ion-surface interaction-driven manufacturing of one-dimensional metal oxide heterostructures from July 1, 2022 to June 30, 2025. The research aims to advance manufacturing techniques for producing large-area arrays of nanostructures with precise geometrical shape and elemental composition control for applications in areas such as biomedical sensing and quantum technologies....
- The National Science Foundation (NSF) awarded a $600,000 Project Grant to the University of California, Los Angeles (UCLA) under the Mathematical and Physical Sciences Federal Grant Program (CFDA 47.049). The ECLIPSE-CHIPS: GOALI award supports a collaborative research effort between UCLA and Lam Research Corporation, with participation from Sandia National Laboratories, to study the behavior of plasmas used in semiconductor chip manufacturing. The project aims to use laser-based techniques to...
- The National Science Foundation (NSF) awarded a $459,834 Project Grant to The Trustees of Columbia University in the City of New York to fund the "CAREER: UNDERSTANDING ELECTROCHEMICAL METAL EXTRACTION IN MOLTEN SALTS FROM FIRST PRINCIPLES" project under the NSF Engineering program (CFDA 47.041). This 5-year research initiative aims to develop environmentally friendly methods for producing and recycling key metals like nickel and cobalt that are essential for clean energy technologies....
- This Project Grant awarded by the National Science Foundation (NSF) Division of Chemistry, under the Mathematical and Physical Sciences (CFDA 47.049) Federal Grant Program, will fund a collaborative research effort between the University of Florida and Johns Hopkins University to explore the underlying chemical reactions involved in two technologically important processes: focused electron beam-induced deposition (FEBID) and extreme ultraviolet lithography (EUVL). The $354,551 award will support...
This National Science Foundation project grant of $697,756 will fund research at the University of California, Los Angeles from July 1, 2022 to June 30, 2025 to develop atomic layer etching processes for layer-by-layer removal of metal films. The research aims to gain a thorough understanding of plasma surface modification and self-limiting surface reaction mechanisms for industrially significant metals such as nickel and copper. The project will integrate computational chemistry modeling with experimental surface engineering to define optimal reactants for precisely engineering metallic surfaces at the atomic scale. Molecular dynamics simulations using neural network potentials will model plasma modification of metal surfaces, verified via surface modification experiments. Thermodynamic and kinetic modeling will determine feasible etching chemistries and reaction pathways. Educational activities will engage underrepresented minority students and informal science communication portals. This award supports the NSF Engineering Directorate's mission to foster innovation in engineering research.
Mod # | Description | ReasonForModification | Federal Obligation | Date |
|---|---|---|---|---|
| Not listed | $348.9k | 6/16/22 |