Purchase Order DOCSB134110SU1031
Award Date 9/23/10
Potential Completion Date 11/29/16
Potential Value $541K
Federal Agency
Awardee
Ultimate Awardee
Not listed NAICS Category
PSC Category
Federal Contract Vehicle
- Not listed
Set-Aside Type
No Set-Aside Used
Extent Competed
Competed under SAP
Major Defense Program
Not listed Pricing Type
Firm Fixed Price
Place of Performance
St. Petersburg, FL 33716, USA
Solicitation Procedures
Simplified Acquisition
Number Of Offers Received
3
Legislative Mandate
Not listed National Interest Action
Not listed Research Type
Not listed Primary Consortia Member
Not listed Similar Awards
- The National Institute of Standards and Technology (NIST), a civilian agency within the Department of Commerce, awarded a $631,302.75 firm fixed price contract to Plasma-Therm LLC, a U.S.-based manufacturer of semiconductor fabrication equipment. The contract is for the delivery of a plasma-enhanced chemical vapor deposition (PECVD) system capable of depositing low optical loss films. This equipment will be used in semiconductor manufacturing processes. The contract has no set-aside...
- This $1,411,586.00 firm fixed price purchase order was awarded by the National Institute of Standards and Technology (NIST), a civilian agency, to Plasma-Therm LLC for the provision of a plasma etching system capable of etching silicon using hydrogen bromide and chlorine gases. The contract has an ultimate completion date of September 28, 2028. This award was made without a set-aside designation and is related to a prior sources sought notice that sought details on a supplier's ability to...
- This is a $197,832.00 firm fixed-price purchase order contract awarded by the National Institute of Standards and Technology (NIST), a civilian agency within the U.S. Department of Commerce, to Plasma-Therm LLC, a U.S.-based manufacturer of semiconductor etching and thin film deposition equipment. The contract is for the upgrade of an ION SKETCH PLASMATHERM CONTROLLER. No set-aside designation was used. Plasma-Therm LLC has received over $2 million in federal contract awards from NIST since 2019...
- The U.S. Department of Commerce's National Institute of Standards and Technology (NIST) awarded a $244,316.00 firm fixed-price purchase order to Plasma-Therm LLC, a U.S.-based manufacturer of semiconductor fabrication equipment, for the refurbishment of a Plasma-Therm 790 Reactive Ion Etch (RIE) system. This sole-source award was made to acquire a refurbished system that is compatible and interoperable with NIST's existing Plasma-Therm 790 RIE systems, allowing for the transfer of process...
- This is a firm fixed-price definitive contract awarded by the Naval Sea Systems Command (NAVSEA) to Plasma-Therm LLC, a U.S.-based manufacturer of semiconductor etching and thin film deposition equipment. The contract, valued at $758,746.00, is for DRIE (Deep Reactive Ion Etching) services and has a completion date of February 28, 2013. The contract is designated as a total small business set-aside. Plasma-Therm LLC has received over $2 million in federal contract awards from the Department of...
- Plasma Etch, Inc. has been awarded a firm-fixed price purchase order for $12,410 by the Department of Commerce's National Institute of Standards and Technology (NIST) to supply one low temperature asher. The award stems from a solicitation NIST issued on October 21, 2022 seeking quotes for a low temperature asher on a total small business set-aside basis. Plasma Etch will deliver the asher to NIST's facility in Gaithersburg, Maryland within 60 days in accordance with the requirement...
- This firm-fixed-price purchase order for $29,835.00 was awarded by the National Institute of Standards and Technology (NIST), a civilian federal agency, to Pie Scientific LLC, a minority-owned, Asian-Pacific American-owned limited liability company that manufactures laboratory plasma systems and equipment. The contract is for the delivery of an in-situ semiconductor plasma cleaning system to support NIST's CHIPS metrology project, which aims to develop measurement science critical to new...
- This is a $33,500.00 firm fixed price purchase order awarded by the Office of Acquisitions and Grants, a civilian agency, to Plasma Etch, Inc., a for-profit small business manufacturer of plasma equipment. The contract is for the delivery of a low-temperature asher and does not have a set-aside designation. Plasma Etch, Inc. has previously provided plasma etching systems, chambers, and associated services to various federal agencies including the Department of Defense and the Department of...
- The Department of Commerce's National Institute of Standards and Technology awarded a $3.988 million firm fixed price purchase order to Oxford Instruments America, Inc. for the delivery of plasma tool and maintenance options. The contract carries a period of performance from December 2023 through March 2029 and will provide NIST's Physical Measurements Laboratory with several plasma processing systems, including fluorine, chlorine, and PECVD tools as well as RIE systems for metals and...
- This is a firm-fixed-price purchase order awarded by the National Institute of Standards and Technology (NIST), a civilian federal agency, to KLA Corporation, a global technology company specializing in semiconductor manufacturing equipment. The contract is for the procurement of an electrical static chuck-based deep reactive ion etching system with a 4-year service agreement. The total ceiling value of the contract is $1,713,660.00, and the ultimate completion date is February 25, 2030. The...
This federal contract award to Plasma-Therm LLC, a U.S.-based manufacturer of semiconductor etching and thin film deposition equipment, was issued by the National Institute of Standards and Technology (NIST), a civilian agency under the U.S. Department of Commerce. The award, valued at $540,500, is for the delivery of a high rate silicon dioxide deep reactive ion etcher system. The contract is a firm fixed-price purchase order with no set-aside designation. Plasma-Therm LLC has received over $2 million in federal contract awards from NIST since 2019 for semiconductor fabrication equipment and related services, including installation, maintenance, and refurbishment of various thin film deposition and etching systems.
Generated 4/2/25, 10:20 AM
Mod # | Description | ReasonForModification | Federal Obligation | Date |
|---|---|---|---|---|
| 1 | Close Out | $0 | 11/29/16 | |
| P001 | Supplemental Agreement for work within scope | $0 | 7/26/11 | |
| Not listed | Not listed | $540.5k | 9/23/10 |